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Being )]TJ 0.001 Tc 0.5155 Tw T* [(ver)4.7 (y)-2 ( cl)3.4 (osel)9.4 (y)4 ( di)3.4 (st)3.4 (ri)3.4 (b)4 (u)-2 (t)3.4 (e)1.7 (d, )6 (t)3.4 (h)-2 (e bl)3.4 (ue l)3.4 (i)3.4 (n)-2 (e)7.7 (s)0.9 ( resem)6.4 (b)-2 (l)3.4 (e)1.7 ( a)7.7 ( )]TJ -0.0028 Tc 0.3756 Tw T* [(co)-5.8 (n)-5.8 (tinuo)-5.8 (us t)5.6 (h)-5.8 (ick)-5.8 ( )6 (b)-5.8 (lu)-5.8 (e)3.9 ( ex)-5.8 (pon)-5.8 (en)-5.8 (tially)-5.8 ( )6 (d)-5.8 (e)-2.1 (creasin)-5.8 (g cu)-5.8 (rv)-5.8 (e, )]TJ -0.0005 Tc 0.3553 Tw 0 -1.144 TD [(except)7.9 ( at l)7.9 (o)-3.5 (w e)6.2 (n)-3.5 (ergies )6 (where )6 (we)6.2 ( ca)6.2 (n )6 (discern a)6.2 ( fe)6.2 (w )]TJ 0.0016 Tc -0.0061 Tw 0 -1.15 TD [(i)4 (ndi)4 (vi)10 (dual)4 ( cu)4.6 (rv)4.6 (es.)6.1 ( )]TJ -0.0006 Tc 0.2955 Tw 1.347 -2.892 Td [(The)6.1 ( ext)7.8 (r)-2.9 (apolation technique,)]TJ -0.0037 Tc 0.2986 Tw 12.03 0 Td [( wh)-6.7 (ich is imb)-6.7 (e)-3 (dd)-6.7 (ed)-6.7 ( i)4.7 (n)-0.7 ( )]TJ 0.0014 Tc -0.0418 Tw -13.377 -1.15 Td [(IN)5 (NO)5 (Vi)3.8 (O)5 (N)-1 (, i)3.8 (s)7.3 ( base)8.1 (d o)4.4 (n)-1.6 ( a c)8.1 (h)-1.6 (a)8.1 (nge )6 (o)4.4 (f)-0.9 ( basi)3.8 (s )6 (ve)8.1 (ct)3.8 (ors )6 (fr)5.1 (om t)3.8 (h)-1.6 (e)8.1 ( )]TJ -0.002 Tc 0.0394 Tw T* [(SRIM simu)-5 (lated)-5 ( )6 (o)-5 (n)-5 (e)4.7 (s for )6 (wh)-5 (i)6.4 (c)-1.3 (h)-5 ( th)-5 (e co)-5 (ord)-5 (i)6.4 (nates in)-5 ( th)-5 (e )6 (2)-5 (D)1.6 ( )]TJ 0.0001 Tc 0.3068 Tw 0 -1.144 TD [(planes a)6.8 (r)-2.2 (e tra)6.8 (n)-2.9 (spose)6.8 (d)-2.9 ( int)8.5 (o)-2.9 ( )]TJ -0.0001 Tc 0.307 Tw 11.814 0 Td [(an alternative)6.6 ( vector space)6.6 ( )]TJ 0.3788 Tw -11.814 -1.15 Td [(whic)6.6 (h )5.9 (basis )5.9 (vectors a)6.6 (r)-2.4 (e t)8.3 (h)2.9 (e projected range)6.6 ( a)6.6 (n)-3.1 (d the)6.6 ( )]TJ 0.0016 Tc -0.0001 Tw T* [(l)4 (o)-1.4 (n)4.6 (g)-1.4 (i)4 (t)4 (udi)10 (nal)4 ( st)4 (r)5.3 (a)2.3 (ggl)4 (e.)6.1 ( )]TJ 0.0023 Tc 0 Tw 0.551 -2.066 Td [(II)6 (I.)]TJ 0 Tc 1.695 0 Td (A)Tj -0.0008 Tc 7.6656 0 0 7.6656 92.5175 186.7873 Tm [(UTOMA)-8 (T)1 (IC )]TJ 0 Tc 9.6252 0 0 9.6252 140.8741 186.7873 Tm (M)Tj -0.0009 Tc 7.6656 0 0 7.6656 149.4618 186.7873 Tm (ONTE)Tj 0.0023 Tc 9.6252 0 0 9.6252 169.865 186.7873 Tm (-C)Tj -0.0003 Tc 0.7729 Tw 7.6656 0 0 7.6656 179.4902 186.7873 Tm [(ARL)-6 (O PROFI)-5.6 (LE )-7.5 (MATCH)-7.5 (I)1.9 (NG)]TJ -0.0011 Tc 0 Tw -11.692 -1.444 Td [(OPTI)-6.4 (MI)-6.4 (ZAT)-6.8 (I)1.1 (ON)]TJ -0.0019 Tc 0.6381 Tw 9.6252 0 0 9.6252 76.8977 164.6551 Tm (Bu)Tj 1.169 -0 Td [(ild)-4.9 (ing)-4.9 ( on th)-4.9 (e ex)-4.9 (trap)-4.9 (olatio)-4.9 (n)-4.9 ( feature d)-4.9 (e)-1.2 (scri)6.5 (b)-4.9 (e)-1.2 (d )]TJ 0.1291 Tw -2.515 -1.144 Td [(p)-4.9 (r)-4.2 (ev)-4.9 (iou)-4.9 (s)-2 (ly, )5.9 (we imp)-4.9 (l)0.5 (emen)-4.9 (ted )5.9 (a Mon)-4.9 (t)0.5 (e-Carl)6.5 (o op)-4.9 (timizatio)-4.9 (n)-4.9 ( )]TJ 0.0011 Tc 0.9285 Tw 0 -1.15 TD [(t)3.5 (echni)3.5 (q)4.1 (u)-1.9 (e )5.9 (w)4.7 (h)-1.9 (i)3.5 (c)1.8 (h )5.9 (mat)3.5 (c)1.8 (he)7.8 (s as ma)7.8 (ny)4.1 ( ener)4.8 (g)4.1 (y)-1.9 (/)3.5 (d)4.1 (ose)7.8 ( )]TJ -0.0019 Tc 0.0393 Tw T* [(co)-4.9 (mb)-4.9 (in)-4.9 (ation)-4.9 ( st)6.5 (ep)-4.9 (s as d)-4.9 (e)4.8 (sired )6 (to)-4.9 ( eith)-4.9 (er an imp)-4.9 (l)0.5 (an)-4.9 (ted ion)-4.9 ( )6 (o)-4.9 (r)1.8 ( )]TJ -0.0003 Tc -0.0042 Tw 0 -1.144 TD [(vacanc)6.4 (y)-3.3 ( distri)8.1 (butio)]TJ -0.0013 Tc 0.0028 Tw 7.623 0 Td [(n profile ta)5.4 (rget. )]TJ 0.0017 Tc 0.4669 Tw 19.123 42.834 Td [(Fi)4.1 (gu)4.7 (re 4)4.7 (. 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Tc 0.0035 Tw T* [(targ)-5 (et an)-5 (d simu)-5 (lated)-5 ( )6 (p)-5 (r)1.7 (o)-5 (f)-4.3 (iles, as listed)-5 ( in th)-5 (e figu)-5 (re. )]TJ 0.0013 Tc 0.581 Tw 0 -40.168 TD [(Fi)3.7 (gu)4.3 (re )6 (5.)5.8 ( C)9.6 (o)-1.7 (m)6.7 (p)-1.7 (ari)3.7 (s)7.2 (on)4.3 ( )6 (be)8 (t)3.7 (w)-1.1 (een)4.3 ( SI)5 (M)4.2 (S)6.6 ( p)4.3 (r)-1 (o)4.3 (f)-1 (i)3.7 (l)3.7 (e)2 (s a)8 (n)4.3 (d)-7.7 ( )]TJ -0.0019 Tc -0.0565 Tw 0 -1.15 TD [(simu)-4.9 (latio)-4.9 (n)-4.9 (s)-2 ( )6 (fo)-4.9 (r Alu)-4.9 (m)-2.5 (i)6.5 (n)-4.9 (um imp)-4.9 (l)0.5 (an)-4.9 (ts in)-4.9 (t)6.5 (o)-4.9 ( th)-4.9 (e )6 (4)-4.9 (H)1.7 (-SiC [0)-4.9 (001)-4.9 (] )]TJ 0.0014 Tc -0.0059 Tw T* [(chan)4.4 (nel)3.8 ( wi)3.8 (t)3.8 (h)-1.6 ( d)4.4 (e)2.1 (pen)4.4 (d)-1.6 (e)8.1 (n)-1.6 (ce on)4.4 ( dos)7.3 (e )-6 (\(a)8.1 (\) )-6 (a)8.1 (n)4.4 (d )-6 (t)3.8 (e)8.1 (mpe)8.1 (r)-0.9 (at)3.8 (ure)8.1 ( )-6 (\()5.1 (b)-1.6 (\))5.1 (.)5.9 ( )]TJ ET q 0.9606 0 0 0.9606 12.05762 20.10398 cm 66.54 549 208.98 -172.02 re W* n q 0 792.03 612 -792 re W n 1 1 1 rg 66.54 376.95 208.98 172.08 re f Q Q q 0.9606 0 0 0.9606 12.05762 20.10398 cm 1 1 1 rg 89.46 409.26 172.38 126.18 re f Q q 0.9606 0 0 0.9606 12.05762 20.10398 cm 0.149 0.149 0.149 rg 89.46 408.96 172.68 0.54 re f Q q 0.9606 0 0 0.9606 12.05762 20.10398 cm 0.149 0.149 0.149 rg 89.22 409.26 0.54 1.98 re f Q q 0.9606 0 0 0.9606 12.05762 20.10398 cm 0.149 0.149 0.149 rg 146.64 409.26 0.6 1.98 re f Q q 0.9606 0 0 0.9606 12.05762 20.10398 cm 0.149 0.149 0.149 rg 204.12 409.26 0.54 1.98 re f Q q 0.9606 0 0 0.9606 12.05762 20.10398 cm 0.149 0.149 0.149 rg 261.54 409.26 0.6 1.98 re f Q q 0.149 0.149 0.149 rg 4.61087 0 0 -42.53519 95.57184 406.6094 cm /Im0 Do Q q 0.149 0.149 0.149 rg 20.28778 0 0 -21.4405 142.60262 406.6094 cm /Im1 Do Q q 0.149 0.149 0.149 rg 0.92218 0 0 -21.4405 162.8904 406.6094 cm /Im2 Do Q q 0.149 0.149 0.149 rg 20.28778 0 0 -21.4405 195.56988 406.6094 cm /Im3 Do Q q 0.149 0.149 0.149 rg 5.53304 0 0 -21.4405 215.85768 406.6094 cm /Im4 Do Q q 0.149 0.149 0.149 rg 20.28778 0 0 -21.4405 250.78494 406.6094 cm /Im5 Do Q q 0.149 0.149 0.149 rg 5.53304 0 0 -21.4405 271.07272 406.6094 cm /Im4 Do Q q 0.149 0.149 0.149 rg 35.96471 0 0 -12.10351 158.39481 393.00735 cm /Im6 Do Q q 0.149 0.149 0.149 rg 9.22172 0 0 -12.10351 194.35953 393.00735 cm /Im7 Do Q q 0.9606 0 0 0.9606 12.05762 20.10398 cm 0.149 0.149 0.149 rg 89.22 409.26 0.54 126.48 re f Q q 0.9606 0 0 0.9606 12.05762 20.10398 cm 0.149 0.149 0.149 rg 89.46 408.96 2.04 0.54 re f Q q 0.9606 0 0 0.9606 12.05762 20.10398 cm 0.149 0.149 0.149 rg 89.46 440.52 2.04 0.54 re f Q q 0.9606 0 0 0.9606 12.05762 20.10398 cm 0.149 0.149 0.149 rg 89.46 472.08 2.04 0.54 re f Q q 0.9606 0 0 0.9606 12.05762 20.10398 cm 0.149 0.149 0.149 rg 89.46 503.58 2.04 0.6 re f Q q 0.9606 0 0 0.9606 12.05762 20.10398 cm 0.149 0.149 0.149 rg 89.46 535.14 2.04 0.6 re f Q q 0.149 0.149 0.149 rg 4.61087 0 0 -42.53519 89.69299 416.1193 cm /Im0 Do Q q 0.149 0.149 0.149 rg 2.76652 0 0 -41.84357 90.32699 446.4357 cm /Im8 Do Q q 0.149 0.149 0.149 rg 4.61087 0 0 -41.84357 89.52008 476.75212 cm /Im9 Do Q q 0.149 0.149 0.149 rg 4.61087 0 0 -42.53519 89.69299 507.06852 cm /Im10 Do Q q 0.149 0.149 0.149 rg 5.07195 0 0 -41.84357 89.34718 537.3273 cm /Im11 Do Q q 0.149 0.149 0.149 rg 6.91629 0 0 -62.93825 76.78258 541.93815 cm /Im12 Do Q q 0.149 0.149 0.149 rg 3.22761 0 0 -62.93825 83.69888 541.93815 cm /Im13 Do Q q 0.149 0.149 0.149 rg 6.91629 0 0 -62.93825 76.78258 478.9999 cm /Im14 Do Q q 0.149 0.149 0.149 rg 3.22761 0 0 -62.93825 83.69888 478.9999 cm /Im15 Do Q q 0.149 0.149 0.149 rg 6.91629 0 0 -62.93825 76.78258 416.06165 cm /Im16 Do Q q 0.149 0.149 0.149 rg 3.22761 0 0 -62.93825 83.69888 416.06165 cm /Im17 Do Q q 0.9606 0 0 0.9606 99.43344 537.15439 cm 0.149 0.149 0.149 rg 0 0 m 0 0.06 0.06 0.12 0.06 0.18 c 2.22 2.28 l 0.06 4.38 l 0 4.44 0 4.5 v 0 4.56 0.06 4.62 y 0.12 4.68 0.18 4.74 0.24 4.74 c 0.3 4.68 0.36 4.68 v 2.52 2.52 l 4.62 4.68 l 4.68 4.74 4.74 4.74 v 4.8 4.74 4.86 4.68 y 4.92 4.62 4.92 4.56 4.92 4.5 c 4.92 4.44 4.92 4.38 4.86 4.38 c 2.76 2.28 l 4.86 0.18 l 4.92 0.12 4.92 0.06 4.92 0 c 4.92 -0.06 4.92 -0.12 4.86 -0.12 c 4.86 -0.18 4.8 -0.18 4.74 -0.18 c 4.68 -0.18 4.62 -0.18 4.62 -0.12 c 2.52 1.98 l 0.36 -0.12 l 0.3 -0.18 0.3 -0.18 0.24 -0.18 c 0.18 -0.18 0.12 -0.18 0.06 -0.12 c 0.06 -0.06 0 -0.06 0 0 c f Q q 0.149 0.149 0.149 rg 9.68281 0 0 -42.53519 107.21427 543.89778 cm /Im18 Do Q q 0.149 0.149 0.149 rg 3.68868 0 0 -33.88983 117.93451 547.35592 cm /Im19 Do Q q 0 0 0 rg 50.25838 0 0 -8.64536 145.25387 546.66429 cm /Im20 Do Q q 0 0 0 rg 21.20996 0 0 -8.64536 195.51225 546.66429 cm /Im21 Do Q q 0 0 0 rg 50.25838 0 0 -8.64536 145.25387 538.01893 cm /Im22 Do Q q 0 0 0 rg 21.20996 0 0 -8.64536 195.51225 538.01893 cm /Im23 Do Q q 0.9606 0 0 0.9606 97.99255 414.33259 cm 0 0 1 RG 0.566 w 1 j 0 0 m 0 31.5 l 0.18 32.64 l 0.18 33.72 l 0.24 34.86 l 0.24 41.64 l 0.3 42.72 l 0.3 47.22 l 0.36 48.36 l 0.36 54 l 0.42 55.14 l 0.42 61.86 l 0.48 63 l 0.48 67.5 l 0.54 68.64 l 0.54 70.86 l 0.6 72 l 0.6 74.28 l 0.66 75.36 l 0.66 78.78 l 0.72 79.92 l 0.72 84.42 l 0.78 85.5 l 0.78 88.92 l 0.84 90 l 0.9 91.14 l 0.9 95.64 l 0.96 96.78 l 0.96 100.14 l 1.14 101.28 l 1.14 102.42 l 1.2 103.56 l 1.2 105.78 l 1.26 106.92 l 1.26 109.14 l 1.32 110.28 l 1.32 111.42 l 1.74 110.28 l 1.8 109.14 l 1.8 108.06 l 1.92 106.92 l 2.04 104.64 l 2.04 101.28 l 2.1 100.14 l 2.1 97.92 l 2.16 96.78 l 2.16 95.64 l 2.22 94.5 l 2.28 93.42 l 2.28 92.28 l 2.34 91.14 l 2.34 88.92 l 2.4 87.78 l 2.4 85.5 l 2.46 84.42 l 2.52 83.28 l 2.52 81 l 2.58 79.92 l 2.58 75.36 l 2.64 74.28 l 2.64 70.86 l 2.7 69.78 l 2.7 68.64 l 2.76 67.5 l 2.76 66.36 l 2.82 65.28 l 2.82 60.78 l 2.88 59.64 l 2.88 58.5 l 2.94 57.36 l 3 56.28 l 3 52.86 l 3.06 51.78 l 3.06 48.36 l 3.12 47.22 l 3.12 46.14 l 3.18 45 l 3.18 43.86 l 3.24 42.72 l 3.24 39.36 l 3.3 38.22 l 3.3 36 l 3.36 34.86 l 3.36 33.72 l 3.42 32.64 l 3.42 31.5 l 3.48 30.36 l 3.54 29.22 l 3.6 28.14 l 3.6 25.86 l 3.66 24.72 l 3.66 22.5 l 3.72 21.36 l 3.78 20.22 l 3.78 19.08 l 3.84 18 l 3.9 16.86 l 3.96 15.72 l 3.96 14.58 l 4.02 13.5 l 4.08 12.36 l 4.14 11.22 l 4.2 10.08 l 4.32 9 l 4.38 7.86 l 4.38 6.72 l 4.5 5.58 l 4.62 4.5 l 4.74 3.36 l 4.92 2.22 l 5.1 1.08 l 5.46 0 l 0 -0.42 m 0 14.52 l 0.24 15.24 l 0.24 16.02 l 0.3 16.74 l 0.3 18.96 l 0.36 19.74 l 0.36 21.96 l 0.42 22.68 l 0.42 24.18 l 0.48 24.96 l 0.48 26.4 l 0.54 27.18 l 0.54 29.4 l 0.6 30.18 l 0.6 31.62 l 0.66 32.4 l 0.66 33.9 l 0.72 34.62 l 0.72 36.84 l 0.78 37.62 l 0.78 39.84 l 0.84 40.62 l 0.84 41.34 l 0.9 42.06 l 0.9 42.84 l 0.96 43.56 l 0.96 45.06 l 1.02 45.84 l 1.02 47.28 l 1.14 48.06 l 1.2 48.78 l 1.2 49.56 l 1.26 50.28 l 1.32 51.06 l 1.32 51.78 l 1.38 52.5 l 1.38 54 l 1.44 54.78 l 1.44 56.28 l 1.5 57 l 1.5 58.5 l 1.56 59.22 l 1.56 60 l 1.62 60.72 l 1.74 61.44 l 1.8 62.22 l 1.8 62.94 l 1.86 63.72 l 1.86 64.44 l 1.92 65.22 l 1.92 65.94 l 1.98 66.66 l 2.04 67.44 l 2.1 68.16 l 2.28 68.94 l 2.46 69.66 l 2.52 70.44 l 2.64 71.88 l 2.76 72.66 l 3 73.38 l 3.06 72.66 l 3.06 71.88 l 3.12 71.16 l 3.12 70.44 l 3.18 69.66 l 3.24 68.94 l 3.24 68.16 l 3.3 67.44 l 3.36 66.66 l 3.6 65.94 l 3.72 65.22 l 3.72 62.94 l 3.78 62.22 l 3.78 60 l 3.84 59.22 l 3.9 58.5 l 3.96 57.72 l 4.08 56.28 l 4.14 55.5 l 4.2 54.78 l 4.2 54 l 4.26 53.28 l 4.26 51.78 l 4.32 51.06 l 4.32 48.06 l 4.38 47.28 l 4.38 45.84 l 4.5 45.06 l 4.56 44.34 l 4.62 43.56 l 4.62 42.84 l 4.68 42.06 l 4.74 41.34 l 4.74 39.84 l 4.8 39.12 l 4.8 37.62 l 4.86 36.84 l 4.86 36.12 l 4.92 35.4 l 4.98 34.62 l 4.98 33.9 l 5.04 33.12 l 5.04 31.62 l 5.1 30.9 l 5.22 30.18 l 5.22 27.9 l 5.28 27.18 l 5.28 25.68 l 5.34 24.96 l 5.4 24.18 l 5.46 23.46 l 5.52 22.68 l 5.58 21.96 l 5.58 21.24 l 5.64 20.46 l 5.7 19.74 l 5.76 18.96 l 5.82 18.24 l 5.82 16.74 l 5.88 16.02 l 5.94 15.24 l 6 14.52 l 6.12 13.74 l 6.12 13.02 l 6.18 12.24 l 6.24 11.52 l 6.36 10.8 l 6.36 10.02 l 6.42 9.3 l 6.42 8.52 l 6.48 7.8 l 6.54 7.02 l 6.66 6.3 l 6.84 5.58 l 7.02 4.8 l 7.08 4.08 l 7.14 3.3 l 7.5 2.58 l 7.56 1.8 l 7.74 1.08 l 8.04 0.36 l 8.76 -0.42 l 0 -0.54 m 0 9.12 l 0.18 9.72 l 0.18 11.04 l 0.24 11.7 l 0.24 12.3 l 0.42 12.96 l 0.42 13.62 l 0.48 14.22 l 0.48 14.88 l 0.54 15.54 l 0.54 16.8 l 0.6 17.46 l 0.6 18.72 l 0.66 19.38 l 0.66 19.98 l 0.72 20.64 l 0.72 21.3 l 0.78 21.96 l 0.78 23.22 l 0.9 23.88 l 0.96 24.48 l 0.96 25.14 l 1.02 25.8 l 1.02 26.4 l 1.08 27.06 l 1.08 27.72 l 1.14 28.32 l 1.14 28.98 l 1.2 29.64 l 1.2 30.24 l 1.26 30.9 l 1.26 31.56 l 1.32 32.22 l 1.32 32.82 l 1.38 33.48 l 1.38 34.14 l 1.44 34.74 l 1.44 35.4 l 1.5 36.06 l 1.56 36.66 l 1.56 37.32 l 1.62 37.98 l 1.62 38.58 l 1.68 39.24 l 1.68 39.9 l 1.74 40.5 l 1.86 41.82 l 1.98 42.48 l 2.04 43.08 l 2.04 43.74 l 2.1 44.4 l 2.16 45 l 2.16 45.66 l 2.22 46.32 l 2.22 47.58 l 2.28 48.24 l 2.28 48.84 l 2.4 49.5 l 2.46 50.16 l 2.52 50.76 l 2.52 51.42 l 2.58 52.08 l 2.7 52.74 l 2.76 53.34 l 2.76 54 l 2.82 54.66 l 2.82 55.26 l 2.94 56.58 l 3 57.18 l 3.12 57.84 l 3.18 58.5 l 3.36 59.1 l 3.48 59.76 l 3.54 60.42 l 3.6 61.02 l 3.66 61.68 l 3.72 62.34 l 3.9 63 l 4.08 62.34 l 4.32 61.02 l 4.38 60.42 l 4.44 59.76 l 4.56 59.1 l 4.56 58.5 l 4.62 57.84 l 4.74 57.18 l 4.86 56.58 l 4.98 55.92 l 4.98 55.26 l 5.04 54.66 l 5.04 54 l 5.1 53.34 l 5.16 52.74 l 5.22 52.08 l 5.22 51.42 l 5.28 50.76 l 5.34 50.16 l 5.4 49.5 l 5.4 48.84 l 5.46 48.24 l 5.58 47.58 l 5.58 46.92 l 5.64 46.32 l 5.64 45.66 l 5.7 45 l 5.76 44.4 l 5.76 43.08 l 5.82 42.48 l 5.88 41.82 l 5.88 41.16 l 5.94 40.5 l 5.94 39.24 l 6.06 38.58 l 6.06 37.98 l 6.18 36.66 l 6.24 36.06 l 6.3 35.4 l 6.36 34.74 l 6.42 34.14 l 6.42 33.48 l 6.48 32.82 l 6.48 31.56 l 6.54 30.9 l 6.6 30.24 l 6.66 29.64 l 6.66 28.98 l 6.72 28.32 l 6.78 27.72 l 6.78 27.06 l 6.84 26.4 l 6.9 25.8 l 6.9 25.14 l 6.96 24.48 l 7.02 23.88 l 7.08 23.22 l 7.08 21.96 l 7.14 21.3 l 7.26 19.98 l 7.32 19.38 l 7.44 18.06 l 7.5 17.46 l 7.56 16.8 l 7.62 16.14 l 7.68 15.54 l 7.68 14.88 l 7.74 14.22 l 7.74 13.62 l 7.8 12.96 l 7.92 12.3 l 8.04 11.7 l 8.1 11.04 l 8.16 10.38 l 8.16 9.72 l 8.28 9.12 l 8.34 8.46 l 8.4 7.8 l 8.46 7.2 l 8.58 6.54 l 8.64 5.88 l 8.82 5.28 l 8.94 4.62 l 9.18 3.96 l 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9.54 l 78.18 9.78 l 78.48 9.84 l 78.78 9.96 l 78.84 9.96 l S Q q 0.9606 0 0 0.9606 188.5959578 413.3527746 cm 0 0 1 RG 0.566 w 1 j 0 0 m 17.58 0.06 l 28.14 0.18 l 37.74 0.42 l 40.2 0.54 l 43.8 0.66 l 45.36 0.78 l 46.44 0.84 l 47.58 0.96 l 49.98 1.2 l 52.26 1.44 l 53.46 1.5 l 54.36 1.62 l 55.68 1.86 l 56.28 1.98 l 56.94 2.1 l 57.54 2.22 l 58.14 2.28 l 58.74 2.4 l 60.72 2.76 l 61.2 2.88 l 61.5 3 l 61.86 3.06 l 62.16 3.18 l 62.52 3.3 l 63.12 3.54 l 63.48 3.66 l 63.84 3.72 l 66 4.44 l 66.3 4.5 l 67.02 4.74 l 67.32 4.86 l 68.04 5.1 l 68.28 5.22 l 68.52 5.28 l 68.82 5.4 l 69.06 5.52 l 69.36 5.64 l 69.84 5.88 l 70.14 5.94 l 70.38 6.06 l 71.88 6.66 l 72.18 6.72 l 72.78 6.96 l 73.5 7.32 l 73.68 7.38 l 74.4 7.74 l 74.58 7.86 l 75.06 8.1 l 75.24 8.16 l 75.48 8.28 l 75.66 8.4 l 75.9 8.52 l 76.08 8.64 l 76.32 8.76 l 76.5 8.88 l 76.74 8.94 l 76.92 9.06 l 77.16 9.18 l 77.34 9.3 l 77.58 9.42 l 77.88 9.54 l 78.12 9.6 l S Q q 0.9606 0 0 0.9606 189.2875898 413.3527746 cm 0 0 1 RG 0.566 w 1 j 0 0 m 17.7 0.06 l 28.26 0.18 l 33.12 0.3 l 37.86 0.42 l 40.38 0.54 l 43.92 0.66 l 45.54 0.78 l 46.62 0.84 l 47.7 0.96 l 50.22 1.2 l 51.3 1.32 l 52.5 1.44 l 53.7 1.5 l 54.54 1.62 l 57.18 2.1 l 57.78 2.22 l 58.32 2.28 l 58.92 2.4 l 60.24 2.64 l 60.96 2.76 l 61.38 2.88 l 61.74 2.94 l 62.04 3.06 l 62.4 3.18 l 63 3.42 l 63.36 3.54 l 63.66 3.66 l 64.02 3.72 l 65.82 4.32 l 66.18 4.38 l 66.54 4.5 l 66.84 4.62 l 67.56 4.86 l 67.86 4.98 l 68.22 5.1 l 68.46 5.16 l 68.76 5.28 l 69 5.4 l 69.3 5.52 l 69.54 5.64 l 69.84 5.76 l 70.08 5.82 l 70.32 5.94 l 71.82 6.54 l 72.12 6.6 l 73.02 6.96 l 73.5 7.2 l 73.68 7.26 l 74.64 7.74 l 74.82 7.86 l 75.06 7.98 l 75.3 8.04 l 75.48 8.16 l 75.72 8.28 l 75.9 8.4 l 76.14 8.52 l 76.32 8.64 l 76.56 8.7 l 76.74 8.82 l 76.98 8.94 l 77.16 9.06 l 77.4 9.18 l S Q q 0.9606 0 0 0.9606 189.9792218 413.3527746 cm 0 0 1 RG 0.566 w 1 j 0 0 m 17.82 0.06 l 28.44 0.18 l 33.3 0.3 l 37.98 0.42 l 40.56 0.54 l 44.1 0.66 l 45.66 0.72 l 46.8 0.84 l 47.88 0.96 l 50.4 1.2 l 51.48 1.32 l 52.68 1.44 l 53.88 1.5 l 54.72 1.62 l 57.36 2.1 l 57.96 2.16 l 58.56 2.28 l 59.1 2.4 l 59.76 2.52 l 60.48 2.64 l 61.14 2.76 l 61.56 2.88 l 61.92 2.94 l 62.22 3.06 l 62.58 3.18 l 62.88 3.3 l 63.24 3.42 l 63.54 3.54 l 63.9 3.6 l 65.7 4.2 l 66.06 4.26 l 66.42 4.38 l 66.72 4.5 l 67.44 4.74 l 67.74 4.86 l 68.1 4.98 l 68.4 5.04 l 68.7 5.16 l 68.94 5.28 l 69.24 5.4 l 69.48 5.52 l 69.78 5.64 l 70.02 5.7 l 70.32 5.82 l 70.56 5.94 l 71.76 6.42 l 72.06 6.48 l 73.26 6.96 l 73.44 7.08 l 73.68 7.14 l 74.64 7.62 l 74.82 7.74 l 75.06 7.8 l 75.54 8.04 l 75.72 8.16 l 75.96 8.28 l 76.14 8.4 l 76.38 8.52 l 76.56 8.58 l 76.68 8.64 l S Q q 0.9606 0 0 0.9606 190.6708442 413.3527746 cm 0 0 1 RG 0.566 w 1 j 0 0 m 17.94 0.06 l 28.56 0.18 l 33.48 0.3 l 38.16 0.42 l 40.74 0.54 l 44.28 0.66 l 45.84 0.72 l 48 0.96 l 49.32 1.08 l 50.58 1.2 l 52.86 1.44 l 54.06 1.5 l 54.96 1.62 l 57.6 2.1 l 58.2 2.16 l 58.74 2.28 l 59.34 2.4 l 61.32 2.76 l 61.8 2.82 l 62.1 2.94 l 62.46 3.06 l 62.76 3.18 l 63.12 3.3 l 63.42 3.42 l 63.78 3.48 l 64.08 3.6 l 65.88 4.2 l 66.24 4.26 l 66.96 4.5 l 67.26 4.62 l 67.98 4.86 l 68.28 4.92 l 68.64 5.04 l 68.88 5.16 l 69.18 5.28 l 69.42 5.4 l 69.72 5.52 l 69.96 5.58 l 70.26 5.7 l 70.5 5.82 l 70.8 5.94 l 71.04 6.06 l 71.34 6.18 l 71.64 6.24 l 73.44 6.96 l 73.68 7.02 l 74.64 7.5 l 74.82 7.62 l 75.06 7.68 l 75.54 7.92 l 75.72 8.04 l 75.96 8.16 l S Q q 0.9606 0 0 0.9606 191.3624762 413.3527746 cm 0 0 1 RG 0.566 w 1 j 0 0 m 18.06 0.06 l 28.74 0.18 l 33.66 0.3 l 38.28 0.42 l 40.92 0.54 l 44.4 0.66 l 46.02 0.72 l 48.18 0.96 l 49.5 1.08 l 50.76 1.2 l 51.9 1.32 l 53.04 1.38 l 54.24 1.5 l 55.14 1.62 l 57.12 1.98 l 57.78 2.04 l 58.98 2.28 l 59.52 2.4 l 61.5 2.76 l 61.98 2.82 l 62.28 2.94 l 63 3.18 l 63.3 3.3 l 63.66 3.42 l 63.96 3.48 l 65.76 4.08 l 66.12 4.14 l 66.84 4.38 l 67.14 4.5 l 67.5 4.62 l 67.8 4.74 l 68.16 4.8 l 68.52 4.92 l 69.12 5.16 l 69.36 5.28 l 69.66 5.4 l 69.9 5.46 l 70.2 5.58 l 70.44 5.7 l 70.74 5.82 l 70.98 5.94 l 71.28 6.06 l 71.58 6.12 l 73.38 6.84 l 73.68 6.9 l 74.64 7.38 l 74.82 7.5 l 75.06 7.56 l 75.24 7.68 l S Q q 0.9606 0 0 0.9606 192.0541082 413.3527746 cm 0 0 1 RG 0.566 w 1 j 0 0 m 18.18 0.06 l 28.92 0.18 l 33.84 0.3 l 38.46 0.42 l 41.1 0.54 l 44.58 0.66 l 46.2 0.72 l 48.36 0.96 l 49.68 1.08 l 50.94 1.2 l 52.08 1.32 l 53.22 1.38 l 54.42 1.5 l 55.32 1.62 l 57.3 1.98 l 58.02 2.04 l 58.62 2.16 l 59.16 2.28 l 59.76 2.4 l 61.08 2.64 l 61.74 2.7 l 62.16 2.82 l 62.52 2.94 l 62.82 3.06 l 63.54 3.3 l 63.84 3.36 l 64.2 3.48 l 64.5 3.6 l 65.58 3.96 l 65.94 4.02 l 67.38 4.5 l 67.68 4.62 l 68.04 4.68 l 68.34 4.8 l 69.06 5.04 l 69.3 5.16 l 69.6 5.28 l 69.84 5.34 l 70.14 5.46 l 70.38 5.58 l 70.68 5.7 l 70.92 5.82 l 71.22 5.94 l 71.52 6 l 73.02 6.6 l 73.32 6.66 l 73.92 6.9 l 74.1 7.02 l 74.34 7.14 l 74.52 7.2 l S Q q 0.9606 0 0 0.9606 192.7457402 413.3527746 cm 0 0 1 RG 0.566 w 1 j 0 0 m 18.3 0.06 l 29.04 0.18 l 34.02 0.3 l 38.58 0.42 l 41.28 0.54 l 44.76 0.66 l 46.32 0.72 l 48.48 0.96 l 51.12 1.2 l 52.26 1.32 l 53.46 1.38 l 54.6 1.5 l 55.5 1.62 l 56.82 1.86 l 57.54 1.98 l 58.2 2.04 l 59.4 2.28 l 59.94 2.4 l 61.26 2.64 l 61.92 2.7 l 62.34 2.82 l 63.06 3.06 l 63.36 3.18 l 63.72 3.3 l 64.08 3.36 l 64.68 3.6 l 65.1 3.72 l 65.82 3.96 l 66.18 4.02 l 67.26 4.38 l 67.56 4.5 l 67.92 4.62 l 68.22 4.68 l 68.94 4.92 l 69.54 5.16 l 69.78 5.22 l 70.08 5.34 l 70.32 5.46 l 70.62 5.58 l 70.86 5.7 l 71.16 5.82 l 71.46 5.88 l 71.7 6 l 72.3 6.24 l 72.66 6.36 l 72.9 6.48 l 73.2 6.54 l 73.8 6.78 l S Q q 0.9606 0 0 0.9606 193.4373625 413.3527746 cm 0 0 1 RG 0.566 w 1 j 0 0 m 18.42 0.06 l 29.22 0.18 l 34.2 0.3 l 38.7 0.42 l 41.4 0.54 l 44.94 0.66 l 46.5 0.72 l 48.66 0.96 l 51.3 1.2 l 52.44 1.32 l 53.64 1.38 l 54.78 1.5 l 55.68 1.62 l 56.34 1.74 l 57.06 1.86 l 57.72 1.92 l 59.04 2.16 l 59.58 2.28 l 60.78 2.52 l 61.44 2.58 l 62.1 2.7 l 62.58 2.82 l 62.88 2.94 l 63.6 3.18 l 63.9 3.24 l 64.62 3.48 l 64.92 3.6 l 65.64 3.84 l 66 3.9 l 67.8 4.5 l 68.1 4.56 l 68.46 4.68 l 68.76 4.8 l 69.48 5.04 l 69.72 5.16 l 70.02 5.22 l 70.26 5.34 l 70.56 5.46 l 70.8 5.58 l 71.1 5.7 l 71.4 5.76 l 71.64 5.88 l 72.84 6.36 l 73.08 6.42 l S Q q 0.9606 0 0 0.9606 194.1289945 413.3527746 cm 0 0 1 RG 0.566 w 1 j 0 0 m 18.54 0.06 l 29.34 0.18 l 34.44 0.3 l 38.88 0.42 l 41.58 0.54 l 45.06 0.66 l 46.68 0.72 l 48.84 0.96 l 51.48 1.2 l 52.68 1.26 l 54.96 1.5 l 55.86 1.62 l 56.52 1.74 l 57.24 1.86 l 57.9 1.92 l 58.62 2.04 l 59.82 2.28 l 60.36 2.4 l 61.02 2.52 l 61.62 2.58 l 62.28 2.7 l 62.76 2.82 l 63.12 2.94 l 63.42 3.06 l 63.78 3.18 l 64.14 3.24 l 64.44 3.36 l 64.8 3.48 l 65.1 3.6 l 65.46 3.72 l 65.88 3.78 l 67.32 4.26 l 67.62 4.38 l 67.98 4.44 l 68.34 4.56 l 68.64 4.68 l 69 4.8 l 69.3 4.92 l 69.66 5.04 l 69.96 5.1 l 70.2 5.22 l 70.5 5.34 l 70.74 5.46 l 71.34 5.7 l 71.58 5.76 l 72.18 6 l 72.36 6.06 l S Q q 0.9606 0 0 0.9606 194.8206169 413.3527746 cm 0 0 1 RG 0.566 w 1 j 0 0 m 18.66 0.06 l 29.52 0.18 l 34.62 0.3 l 39 0.42 l 41.76 0.54 l 45.24 0.66 l 46.8 0.72 l 48.96 0.96 l 50.34 1.08 l 51.66 1.2 l 52.86 1.26 l 55.14 1.5 l 56.04 1.62 l 56.76 1.74 l 57.42 1.86 l 58.14 1.92 l 59.46 2.16 l 60.54 2.4 l 61.2 2.46 l 62.52 2.7 l 62.94 2.82 l 63.66 3.06 l 63.96 3.12 l 65.04 3.48 l 65.34 3.6 l 65.7 3.72 l 66.06 3.78 l 67.5 4.26 l 67.86 4.32 l 68.22 4.44 l 68.52 4.56 l 68.88 4.68 l 69.18 4.8 l 69.54 4.92 l 69.84 4.98 l 70.44 5.22 l 70.68 5.34 l 71.28 5.58 l 71.52 5.64 l 71.64 5.7 l S Q q 0.9606 0 0 0.9606 195.4546129 413.3527746 cm 0 0 1 RG 0.566 w 1 j 0 0 m 18.9 0.06 l 29.76 0.18 l 34.86 0.3 l 39.18 0.42 l 42 0.54 l 45.48 0.6 l 47.04 0.72 l 49.2 0.96 l 51.96 1.2 l 53.1 1.26 l 55.38 1.5 l 56.28 1.62 l 57 1.74 l 57.66 1.86 l 58.38 1.92 l 59.1 2.04 l 59.7 2.16 l 60.24 2.28 l 60.84 2.4 l 61.44 2.46 l 62.76 2.7 l 63.18 2.82 l 63.9 3.06 l 64.26 3.12 l 64.62 3.24 l 64.92 3.36 l 65.28 3.48 l 65.58 3.6 l 65.94 3.66 l 66.36 3.78 l 67.8 4.26 l 68.1 4.32 l 68.82 4.56 l 69.12 4.68 l 69.48 4.8 l 69.78 4.86 l 70.14 4.98 l 70.44 5.1 l 70.68 5.22 l 70.98 5.34 l S Q q 0.9606 0 0 0.9606 196.1462449 413.3527746 cm 0 0 1 RG 0.566 w 1 j 0 0 m 19.02 0.06 l 29.88 0.18 l 35.04 0.3 l 39.36 0.42 l 42.18 0.54 l 45.6 0.6 l 47.22 0.72 l 49.38 0.96 l 52.14 1.2 l 53.28 1.26 l 54.48 1.38 l 55.56 1.5 l 56.46 1.62 l 57.18 1.74 l 57.9 1.8 l 58.62 1.92 l 59.94 2.16 l 61.02 2.4 l 61.68 2.46 l 62.28 2.58 l 62.94 2.7 l 63.36 2.82 l 63.72 2.94 l 64.08 3 l 65.16 3.36 l 65.46 3.48 l 65.82 3.6 l 66.18 3.66 l 67.62 4.14 l 67.98 4.2 l 68.7 4.44 l 69 4.56 l 69.36 4.68 l 69.66 4.8 l 70.02 4.86 l 70.26 4.98 l S Q q 0.9606 0 0 0.9606 196.8378673 413.3527746 cm 0 0 1 RG 0.566 w 1 j 0 0 m 19.14 0.06 l 30.06 0.18 l 35.22 0.3 l 39.48 0.42 l 42.36 0.54 l 45.78 0.6 l 47.34 0.72 l 49.5 0.96 l 50.94 1.08 l 52.32 1.2 l 53.46 1.26 l 54.66 1.38 l 55.74 1.5 l 56.64 1.62 l 57.36 1.74 l 58.08 1.8 l 59.52 2.04 l 60.12 2.16 l 60.66 2.28 l 61.26 2.34 l 61.86 2.46 l 62.52 2.58 l 63.12 2.7 l 63.6 2.82 l 63.96 2.94 l 64.32 3 l 64.62 3.12 l 65.7 3.48 l 66 3.54 l 66.72 3.78 l 67.14 3.9 l 67.5 4.02 l 67.86 4.08 l 68.22 4.2 l 68.52 4.32 l 69.24 4.56 l 69.54 4.62 l S Q q 0.9606 0 0 0.9606 197.5294993 413.3527746 cm 0 0 1 RG 0.566 w 1 j 0 0 m 19.26 0.06 l 30.18 0.18 l 35.4 0.3 l 39.66 0.42 l 42.54 0.54 l 45.96 0.6 l 47.52 0.72 l 49.68 0.96 l 51.12 1.08 l 52.5 1.14 l 53.64 1.26 l 54.84 1.38 l 55.98 1.5 l 56.82 1.62 l 57.54 1.74 l 58.26 1.8 l 59.7 2.04 l 60.36 2.16 l 60.9 2.28 l 61.44 2.34 l 62.1 2.46 l 63.3 2.7 l 63.78 2.82 l 64.14 2.88 l 65.58 3.36 l 65.88 3.48 l 66.24 3.54 l 67.68 4.02 l 68.04 4.08 l 68.76 4.32 l 68.82 4.32 l S Q q 0.9606 0 0 0.9606 198.2211313 413.3527746 cm 0 0 1 RG 0.566 w 1 j 0 0 m 19.38 0.06 l 30.36 0.18 l 35.58 0.3 l 39.78 0.42 l 42.72 0.54 l 46.08 0.6 l 47.7 0.72 l 48.78 0.84 l 49.8 0.96 l 51.3 1.08 l 52.68 1.14 l 53.88 1.26 l 56.16 1.5 l 57 1.62 l 57.78 1.68 l 59.94 2.04 l 60.54 2.16 l 61.08 2.28 l 61.68 2.34 l 62.88 2.58 l 63.54 2.7 l 63.96 2.82 l 64.32 2.88 l 65.76 3.36 l 66.12 3.42 l 66.42 3.54 l 67.5 3.9 l 67.92 3.96 l 68.1 4.02 l S Q q 0.9606 0 0 0.9606 198.9127633 413.3527746 cm 0 0 1 RG 0.566 w 1 j 0 0 m 19.5 0.06 l 30.48 0.18 l 35.76 0.3 l 39.9 0.42 l 42.9 0.54 l 46.26 0.6 l 47.82 0.72 l 49.98 0.96 l 51.42 1.08 l 52.86 1.14 l 55.26 1.38 l 56.34 1.5 l 57.24 1.62 l 57.96 1.68 l 60.12 2.04 l 60.72 2.16 l 61.32 2.22 l 61.86 2.34 l 62.46 2.46 l 63.12 2.58 l 63.72 2.7 l 64.14 2.76 l 65.58 3.24 l 66 3.36 l 66.3 3.42 l 67.38 3.78 l S Q q 0.9606 0 0 0.9606 199.6043857 413.3527746 cm 0 0 1 RG 0.566 w 1 j 0 0 m 19.62 0.06 l 30.66 0.18 l 35.94 0.3 l 40.08 0.42 l 43.02 0.54 l 46.44 0.6 l 48 0.72 l 50.16 0.96 l 51.6 1.08 l 53.04 1.14 l 55.44 1.38 l 56.52 1.5 l 57.42 1.62 l 58.14 1.68 l 59.58 1.92 l 60.36 2.04 l 60.96 2.16 l 61.5 2.22 l 63.9 2.7 l 64.38 2.76 l 65.82 3.24 l 66.18 3.3 l 66.54 3.42 l 66.66 3.48 l S Q q 0.9606 0 0 0.9606 200.2960177 413.3527746 cm 0 0 1 RG 0.566 w 1 j 0 0 m 19.74 0.06 l 30.84 0.18 l 36.18 0.3 l 40.2 0.42 l 43.2 0.54 l 46.56 0.6 l 48.18 0.72 l 49.26 0.84 l 50.28 0.96 l 51.78 1.08 l 53.22 1.14 l 55.62 1.38 l 56.7 1.5 l 57.6 1.62 l 58.32 1.68 l 59.04 1.8 l 59.82 1.92 l 60.54 2.04 l 61.14 2.16 l 61.74 2.22 l 62.28 2.34 l 64.08 2.7 l 64.56 2.76 l 65.64 3.12 l 65.94 3.18 l S Q q 0.9606 0 0 0.9606 200.9876497 413.3527746 cm 0 0 1 RG 0.566 w 1 j 0 0 m 19.86 0.06 l 30.96 0.18 l 36.36 0.3 l 40.38 0.42 l 43.38 0.54 l 46.74 0.6 l 48.36 0.72 l 49.38 0.84 l 50.46 0.96 l 51.96 1.08 l 53.46 1.14 l 54.6 1.26 l 55.8 1.38 l 56.88 1.5 l 57.78 1.56 l 58.5 1.68 l 59.28 1.8 l 60 1.92 l 60.78 2.04 l 61.38 2.1 l 62.46 2.34 l 63.06 2.46 l 63.72 2.58 l 64.32 2.64 l 64.74 2.76 l 65.1 2.88 l 65.22 2.88 l S Q q 0.9606 0 0 0.9606 201.6792817 413.3527746 cm 0 0 1 RG 0.566 w 1 j 0 0 m 19.98 0.06 l 31.14 0.18 l 36.54 0.3 l 40.5 0.42 l 43.56 0.54 l 46.92 0.6 l 48.48 0.72 l 50.64 0.96 l 52.14 1.02 l 53.64 1.14 l 54.84 1.26 l 55.98 1.38 l 57.06 1.5 l 57.96 1.56 l 58.68 1.68 l 59.46 1.8 l 60.18 1.92 l 60.96 2.04 l 61.56 2.1 l 62.16 2.22 l 62.7 2.34 l 63.9 2.58 l 64.5 2.64 l S Q q 0.9606 0 0 0.9606 202.3709137 413.3527746 cm 0 0 1 RG 0.566 w 1 j 0 0 m 20.1 0.06 l 31.26 0.18 l 36.72 0.3 l 40.62 0.42 l 43.74 0.48 l 47.04 0.6 l 48.66 0.72 l 49.74 0.84 l 50.76 0.96 l 52.32 1.02 l 53.82 1.14 l 56.22 1.38 l 57.24 1.5 l 58.14 1.56 l 58.92 1.68 l 59.64 1.8 l 60.42 1.92 l 61.14 2.04 l 61.8 2.1 l 62.88 2.34 l 63.78 2.52 l S Q q 0.9606 0 0 0.9606 203.0625361 413.3527746 cm 0 0 1 RG 0.566 w 1 j 0 0 m 20.22 0.06 l 31.44 0.18 l 36.9 0.3 l 40.8 0.42 l 43.92 0.48 l 47.22 0.6 l 48.84 0.72 l 49.86 0.84 l 50.94 0.96 l 52.5 1.02 l 54 1.14 l 56.4 1.38 l 57.42 1.5 l 58.32 1.56 l 59.88 1.8 l 60.6 1.92 l 61.38 2.04 l 61.98 2.1 l 62.58 2.22 l 63.06 2.34 l S Q q 0.9606 0 0 0.9606 203.7541585 413.3527746 cm 0 0 1 RG 0.566 w 1 j 0 0 m 20.34 0.06 l 31.62 0.18 l 37.08 0.3 l 40.92 0.42 l 44.1 0.48 l 47.4 0.6 l 48.96 0.72 l 51.12 0.96 l 52.68 1.02 l 54.18 1.14 l 56.58 1.38 l 57.6 1.5 l 58.5 1.56 l 60.84 1.92 l 61.56 1.98 l 62.22 2.1 l 62.34 2.16 l S Q q 0.9606 0 0 0.9606 204.4457905 413.3527746 cm 0 0 1 RG 0.566 w 1 j 0 0 m 20.46 0.06 l 31.74 0.18 l 37.26 0.3 l 41.04 0.42 l 44.28 0.48 l 47.52 0.6 l 49.14 0.72 l 50.22 0.84 l 51.24 0.96 l 52.8 1.02 l 54.36 1.14 l 56.76 1.38 l 57.78 1.44 l 58.68 1.56 l 61.02 1.92 l 61.62 1.98 l S Q q 0.9606 0 0 0.9606 205.1374225 413.3527746 cm 0 0 1 RG 0.566 w 1 j 0 0 m 20.58 0.06 l 31.92 0.18 l 37.44 0.3 l 41.22 0.42 l 44.4 0.48 l 47.7 0.6 l 49.32 0.72 l 50.34 0.84 l 51.42 0.96 l 52.98 1.02 l 54.54 1.14 l 55.8 1.26 l 57 1.38 l 58.02 1.44 l 58.86 1.56 l 60.42 1.8 l 60.9 1.86 l S Q q 0.9606 0 0 0.9606 205.8290449 413.3527746 cm 0 0 1 RG 0.566 w 1 j 0 0 m 20.7 0.06 l 32.04 0.18 l 37.68 0.3 l 41.34 0.42 l 44.58 0.48 l 47.88 0.6 l 49.44 0.72 l 50.52 0.84 l 51.54 0.96 l 53.16 1.02 l 54.72 1.14 l 55.98 1.26 l 57.18 1.38 l 58.2 1.44 l 59.04 1.56 l 59.82 1.68 l 60.18 1.74 l S Q q 0.9606 0 0 0.9606 206.5206769 413.3527746 cm 0 0 1 RG 0.566 w 1 j 0 0 m 20.82 0.06 l 32.22 0.18 l 37.86 0.3 l 41.52 0.42 l 44.76 0.48 l 48 0.6 l 49.62 0.72 l 50.7 0.84 l 51.72 0.9 l 54.96 1.14 l 57.36 1.38 l 58.38 1.44 l 59.22 1.56 l 59.46 1.62 l S Q q 0.9606 0 0 0.9606 207.1546729 413.3527746 cm 0 0 1 RG 0.566 w 1 j 0 0 m 21 0.06 l 32.46 0.18 l 38.1 0.3 l 41.7 0.42 l 45 0.48 l 48.24 0.6 l 49.86 0.72 l 50.88 0.84 l 51.96 0.9 l 55.2 1.14 l 57.6 1.38 l 58.62 1.44 l 58.8 1.5 l S Q q 0.9606 0 0 0.9606 207.8463049 413.3527746 cm 0 0 1 RG 0.566 w 1 j 0 0 m 21.12 0.06 l 32.58 0.18 l 38.28 0.3 l 41.82 0.42 l 45.18 0.48 l 48.42 0.6 l 49.98 0.72 l 51.06 0.84 l 52.08 0.9 l 53.76 1.02 l 55.38 1.14 l 56.58 1.26 l 57.78 1.32 l 58.08 1.38 l S Q q 0.9606 0 0 0.9606 208.5379369 413.3527746 cm 0 0 1 RG 0.566 w 1 j 0 0 m 21.24 0.06 l 32.76 0.18 l 38.46 0.3 l 42 0.42 l 45.36 0.48 l 48.6 0.6 l 50.16 0.72 l 51.24 0.84 l 52.26 0.9 l 53.94 1.02 l 55.56 1.14 l 56.82 1.26 l 57.36 1.26 l S Q q 0.9606 0 0 0.9606 209.2295593 413.3527746 cm 0 0 1 RG 0.566 w 1 j 0 0 m 21.36 0.06 l 32.88 0.18 l 38.64 0.3 l 42.12 0.42 l 45.54 0.48 l 48.72 0.6 l 50.34 0.72 l 51.36 0.84 l 52.44 0.9 l 54.12 1.02 l 55.74 1.14 l 56.64 1.2 l S Q q 0.9606 0 0 0.9606 209.9211913 413.3527746 cm 0 0 1 RG 0.566 w 1 j 0 0 m 21.48 0.06 l 33.06 0.18 l 38.82 0.3 l 42.3 0.42 l 45.72 0.48 l 48.9 0.6 l 50.52 0.72 l 51.54 0.84 l 52.56 0.9 l 54.3 1.02 l 55.92 1.14 l S Q q 0.9606 0 0 0.9606 210.6128233 413.3527746 cm 0 0 1 RG 0.566 w 1 j 0 0 m 21.6 0.06 l 33.24 0.18 l 39 0.3 l 42.42 0.42 l 45.84 0.48 l 49.08 0.6 l 50.64 0.72 l 51.72 0.84 l 52.74 0.9 l 54.42 1.02 l 55.2 1.08 l S Q q 0.9606 0 0 0.9606 211.3044553 413.3527746 cm 0 0 1 RG 0.566 w 1 j 0 0 m 21.72 0.06 l 33.36 0.18 l 39.18 0.3 l 42.54 0.42 l 46.02 0.48 l 49.2 0.6 l 50.82 0.72 l 51.84 0.84 l 52.92 0.9 l 54.48 1.02 l S Q q 0.9606 0 0 0.9606 211.9960777 413.3527746 cm 0 0 1 RG 0.566 w 1 j 0 0 m 21.84 0.06 l 33.54 0.18 l 39.42 0.3 l 42.72 0.36 l 46.2 0.48 l 49.38 0.6 l 51 0.72 l 52.02 0.78 l 53.04 0.9 l 53.76 0.96 l S Q q 0.9606 0 0 0.9606 212.6877097 413.295139 cm 0 0 1 RG 0.566 w 1 j 0 0 m 21.96 0.12 l 33.66 0.24 l 39.6 0.36 l 42.84 0.42 l 46.38 0.54 l 49.56 0.66 l 51.12 0.78 l 52.2 0.84 l 53.04 0.96 l S Q q 0.9606 0 0 0.9606 213.3793321 413.2951389 cm 0 0 1 RG 0.566 w 1 j 0 0 m 22.08 0.12 l 33.84 0.24 l 39.78 0.36 l 42.96 0.42 l 46.56 0.54 l 49.68 0.66 l 51.3 0.78 l 52.32 0.84 l S Q q 0.9606 0 0 0.9606 214.0709641 413.2951389 cm 0 0 1 RG 0.566 w 1 j 0 0 m 22.2 0.12 l 34.02 0.24 l 39.96 0.36 l 43.14 0.42 l 46.74 0.54 l 49.86 0.66 l 51.48 0.78 l 51.6 0.78 l S Q q 0.9606 0 0 0.9606 214.7625961 413.2951389 cm 0 0 1 RG 0.566 w 1 j 0 0 m 22.32 0.12 l 34.14 0.24 l 40.14 0.36 l 43.26 0.42 l 46.92 0.54 l 50.04 0.66 l 50.88 0.72 l S Q q 0.9606 0 0 0.9606 215.4542185 413.2951389 cm 0 0 1 RG 0.566 w 1 j 0 0 m 22.44 0.12 l 34.32 0.24 l 40.32 0.36 l 43.44 0.42 l 47.1 0.54 l 50.16 0.66 l S Q q 0.9606 0 0 0.9606 216.1458505 413.2951389 cm 0 0 1 RG 0.566 w 1 j 0 0 m 22.56 0.12 l 34.44 0.24 l 43.56 0.42 l 47.22 0.54 l 49.44 0.6 l S Q q 0.9606 0 0 0.9606 216.8374825 413.2951389 cm 0 0 1 RG 0.566 w 1 j 0 0 m 22.68 0.12 l 34.62 0.24 l 43.68 0.42 l 47.4 0.54 l 48.72 0.6 l S Q q 0.9606 0 0 0.9606 217.7596585 413.2951389 cm 0 0 1 RG 0.566 w 1 j 0 0 m 22.8 0.12 l 34.68 0.24 l 43.8 0.42 l 47.52 0.54 l 47.76 0.54 l S Q q 0.9606 0 0 0.9606 218.6818249 413.2951389 cm 0 0 1 RG 0.566 w 1 j 0 0 m 22.86 0.12 l 34.8 0.24 l 43.92 0.42 l 46.8 0.54 l S Q q 0.9606 0 0 0.9606 219.6040009 413.2951389 cm 0 0 1 RG 0.566 w 1 j 0 0 m 22.98 0.12 l 34.86 0.24 l 41.04 0.36 l 44.04 0.42 l 45.84 0.48 l S Q q 0.9606 0 0 0.9606 220.5838129 413.2951389 cm 0 0 1 RG 0.566 w 1 j 0 0 m 23.04 0.12 l 34.92 0.24 l 41.1 0.36 l 44.1 0.42 l 44.82 0.48 l S Q q 0.9606 0 0 0.9606 221.5059793 413.2951389 cm 0 0 1 RG 0.566 w 1 j 0 0 m 23.1 0.12 l 34.98 0.24 l 41.16 0.36 l 43.86 0.42 l S Q q 0.9606 0 0 0.9606 222.4281457 413.2951389 cm 0 0 1 RG 0.566 w 1 j 0 0 m 23.22 0.12 l 35.1 0.24 l 41.28 0.36 l 42.9 0.42 l S Q q 0.9606 0 0 0.9606 223.4079577 413.2951389 cm 0 0 1 RG 0.566 w 1 j 0 0 m 23.22 0.12 l 35.1 0.24 l 41.34 0.36 l 41.88 0.36 l S Q q 0.9606 0 0 0.9606 224.3301241 413.2951389 cm 0 0 1 RG 0.566 w 1 j 0 0 m 23.34 0.12 l 40.92 0.3 l S Q q 0.9606 0 0 0.9606 225.2523001 413.2951389 cm 0 0 1 RG 0.566 w 1 j 0 0 m 23.4 0.12 l 35.28 0.24 l 39.96 0.3 l S Q q 0.9606 0 0 0.9606 226.1744761 413.2951389 cm 0 0 1 RG 0.566 w 1 j 0 0 m 23.52 0.12 l 35.34 0.24 l 39 0.3 l S Q q 0.9606 0 0 0.9606 227.1542881 413.2951389 cm 0 0 1 RG 0.566 w 1 j 0 0 m 23.52 0.12 l 35.4 0.24 l 37.98 0.3 l S Q q 0.9606 0 0 0.9606 228.0764545 413.2951389 cm 0 0 1 RG 0.566 w 1 j 0 0 m 23.64 0.12 l 35.46 0.24 l 37.02 0.24 l S Q q 0.9606 0 0 0.9606 228.9986305 413.2951389 cm 0 0 1 RG 0.566 w 1 j 0 0 m 23.7 0.12 l 35.52 0.24 l 36.06 0.24 l S Q q 0.9606 0 0 0.9606 229.9208065 413.2951389 cm 0 0 1 RG 0.566 w 1 j 0 0 m 23.82 0.12 l 35.1 0.24 l S Q q 0.9606 0 0 0.9606 230.9006089 413.2951389 cm 0 0 1 RG 0.566 w 1 j 0 0 m 23.82 0.12 l 34.08 0.24 l S Q q 0.9606 0 0 0.9606 231.8227752 413.2951389 cm 0 0 1 RG 0.566 w 1 j 0 0 m 23.94 0.12 l 33.12 0.18 l S Q q 0.9606 0 0 0.9606 232.7449512 413.2951389 cm 0 0 1 RG 0.566 w 1 j 0 0 m 24 0.12 l 32.16 0.18 l S Q q 0.9606 0 0 0.9606 233.6671176 413.2951389 cm 0 0 1 RG 0.566 w 1 j 0 0 m 24.12 0.12 l 31.2 0.18 l S Q q 0.9606 0 0 0.9606 234.6469296 413.2951389 cm 0 0 1 RG 0.566 w 1 j 0 0 m 24.18 0.12 l 30.18 0.18 l S Q q 0.9606 0 0 0.9606 235.5691056 413.2951389 cm 0 0 1 RG 0.566 w 1 j 0 0 m 24.24 0.12 l 29.22 0.18 l S Q q 0.9606 0 0 0.9606 236.491272 413.2951389 cm 0 0 1 RG 0.566 w 1 j 0 0 m 24.36 0.12 l 28.26 0.18 l S Q q 0.9606 0 0 0.9606 237.471084 413.2951389 cm 0 0 1 RG 0.566 w 1 j 0 0 m 24.36 0.12 l 27.24 0.18 l S Q q 0.9606 0 0 0.9606 238.39326 413.2951389 cm 0 0 1 RG 0.566 w 1 j 0 0 m 24.48 0.12 l 26.28 0.12 l S Q q 0.9606 0 0 0.9606 239.315436 413.2951389 cm 0 0 1 RG 0.566 w 1 j 0 0 m 24.54 0.12 l 25.32 0.12 l S Q q 0.9606 0 0 0.9606 240.2376024 413.2951389 cm 0 0 1 RG 0.566 w 1 j 0 0 m 24.36 0.12 l S Q q 0.9606 0 0 0.9606 241.2174048 413.2951389 cm 0 0 1 RG 0.566 w 1 j 0 0 m 23.34 0.12 l S Q q 0.9606 0 0 0.9606 242.1395808 413.2951389 cm 0 0 1 RG 0.566 w 1 j 0 0 m 22.38 0.12 l S Q q 0.9606 0 0 0.9606 243.0617472 413.2951389 cm 0 0 1 RG 0.566 w 1 j 0 0 m 21.42 0.12 l S Q q 0.9606 0 0 0.9606 243.9839232 413.2951389 cm 0 0 1 RG 0.566 w 1 j 0 0 m 20.46 0.12 l S Q q 0.9606 0 0 0.9606 244.9637352 413.2951389 cm 0 0 1 RG 0.566 w 1 j 0 0 m 19.44 0.12 l S Q q 0.9606 0 0 0.9606 245.8859016 413.2951389 cm 0 0 1 RG 0.566 w 1 j 0 0 m 18.48 0.12 l S Q q 0.9606 0 0 0.9606 246.8080776 413.2951389 cm 0 0 1 RG 0.566 w 1 j 0 0 m 17.52 0.12 l S Q q 0.9606 0 0 0.9606 247.7878896 413.2951389 cm 0 0 1 RG 0.566 w 1 j 0 0 m 16.5 0.06 l S Q q 0.9606 0 0 0.9606 248.7100656 413.2951389 cm 0 0 1 RG 0.566 w 1 j 0 0 m 15.54 0.06 l S Q q 0.9606 0 0 0.9606 249.632232 413.2951389 cm 0 0 1 RG 0.566 w 1 j 0 0 m 14.58 0.06 l S Q q 0.9606 0 0 0.9606 250.5543984 413.2951389 cm 0 0 1 RG 0.566 w 1 j 0 0 m 13.62 0.06 l S Q q 0.9606 0 0 0.9606 251.5342104 413.2951389 cm 0 0 1 RG 0.566 w 1 j 0 0 m 12.6 0.06 l S Q q 0.9606 0 0 0.9606 252.4563768 413.2951389 cm 0 0 1 RG 0.566 w 1 j 0 0 m 11.64 0.06 l S Q q 0.9606 0 0 0.9606 253.3785528 413.2951389 cm 0 0 1 RG 0.566 w 1 j 0 0 m 10.68 0.06 l S Q q 0.9606 0 0 0.9606 254.3007288 413.2951389 cm 0 0 1 RG 0.566 w 1 j 0 0 m 9.72 0.06 l S Q q 0.9606 0 0 0.9606 255.2805312 413.2951389 cm 0 0 1 RG 0.566 w 1 j 0 0 m 8.7 0.06 l S Q q 0.9606 0 0 0.9606 256.2027072 413.2951389 cm 0 0 1 RG 0.566 w 1 j 0 0 m 7.74 0.06 l S Q q 0.9606 0 0 0.9606 257.1248832 413.2951389 cm 0 0 1 RG 0.566 w 1 j 0 0 m 6.78 0.06 l S Q q 0.9606 0 0 0.9606 258.0470496 413.2951389 cm 0 0 1 RG 0.566 w 1 j 0 0 m 5.82 0.06 l S Q q 0.9606 0 0 0.9606 259.0268616 413.2951389 cm 0 0 1 RG 0.566 w 1 j 0 0 m 4.8 0.06 l S Q q 0.9606 0 0 0.9606 259.949028 413.2951389 cm 0 0 1 RG 0.566 w 1 j 0 0 m 3.84 0.06 l S Q q 0.9606 0 0 0.9606 260.871204 413.2951389 cm 0 0 1 RG 0.566 w 1 j 0 0 m 2.88 0.06 l S Q q 0.9606 0 0 0.9606 261.8510064 413.2951389 cm 0 0 1 RG 0.566 w 1 j 0 0 m 1.86 0 l S Q q 0.9606 0 0 0.9606 262.7731824 413.2951389 cm 0 0 1 RG 0.566 w 1 j 0 0 m 0.9 0 l S Q q 0.9606 0 0 0.9606 98.2230844 419.92325 cm 1 0 0 RG 0.566 w 0 0 m 0 -6.78 l S Q q 0.9606 0 0 0.9606 94.995478 416.6380172 cm 1 0 0 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410.9320725 cm 1 0 0 RG 0.566 w 0 0 m 4.8 4.8 l S Q q 0.9606 0 0 0.9606 127.7902294 416.4651092 cm 1 0 0 RG 0.566 w 0 0 m 0 -6.78 l S Q q 0.9606 0 0 0.9606 124.562623 413.2375029 cm 1 0 0 RG 0.566 w 0 0 m 6.78 0 l S Q q 0.9606 0 0 0.9606 125.484799 415.5429332 cm 1 0 0 RG 0.566 w 0 0 m 4.8 -4.8 l S Q q 0.9606 0 0 0.9606 125.4847978 410.9320725 cm 1 0 0 RG 0.566 w 0 0 m 4.8 4.8 l S Q q 0.9606 0 0 0.9606 128.1360442 416.4651092 cm 1 0 0 RG 0.566 w 0 0 m 0 -6.78 l S Q q 0.9606 0 0 0.9606 124.9084378 413.2375029 cm 1 0 0 RG 0.566 w 0 0 m 6.78 0 l S Q q 0.9606 0 0 0.9606 125.8306138 415.5429332 cm 1 0 0 RG 0.566 w 0 0 m 4.8 -4.8 l S Q q 0.9606 0 0 0.9606 125.8306124 410.9320725 cm 1 0 0 RG 0.566 w 0 0 m 4.8 4.8 l S Q q 0.9606 0 0 0.9606 128.4818588 416.4651092 cm 1 0 0 RG 0.566 w 0 0 m 0 -6.78 l S Q q 0.9606 0 0 0.9606 125.1966164 413.2375029 cm 1 0 0 RG 0.566 w 0 0 m 6.84 0 l S Q q 0.9606 0 0 0.9606 126.1764284 415.5429332 cm 1 0 0 RG 0.566 w 0 0 m 4.8 -4.8 l S Q q 0.9606 0 0 0.9606 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50.76 1.56 l 50.76 1.5 l 50.88 1.5 l 50.88 1.44 l 50.94 1.44 l 51 1.38 l 51.12 1.38 l 51.12 1.32 l 51.24 1.32 l 51.24 1.26 l 51.36 1.26 l 51.36 1.2 l 51.48 1.2 l 51.48 1.14 l 51.66 1.14 l 51.66 1.08 l 51.78 1.08 l 51.78 1.02 l 51.9 1.02 l 51.9 0.96 l 52.02 0.96 l 52.02 0.9 l 52.14 0.9 l 52.14 0.84 l 52.26 0.84 l 52.26 0.78 l 52.44 0.78 l 52.44 0.72 l 52.56 0.72 l 52.56 0.66 l 52.68 0.66 l 52.68 0.6 l 52.8 0.6 l 52.8 0.54 l 52.98 0.54 l 52.98 0.48 l 53.16 0.48 l 53.16 0.42 l 53.7 0.42 l 53.7 0.36 l 54.06 0.36 l 54.06 0.3 l 54.36 0.3 l 54.36 0.24 l 55.32 0.24 l 55.32 0.18 l 55.62 0.18 l 55.68 0.12 l 56.58 0.12 l 56.58 0.06 l 57.9 0.06 l 57.9 0 l 58.38 0 l 58.38 -0.06 l 68.22 -0.06 l S Q q 0.9606 0 0 0.9606 98.6841691 416.5227452 cm 1 0 0 RG 0.566 w 0 0 m 0 -6.78 l S Q q 0.9606 0 0 0.9606 95.3989267 413.2375029 cm 1 0 0 RG 0.566 w 0 0 m 6.78 0 l S Q q 0.9606 0 0 0.9606 96.3787387 415.5429332 cm 1 0 0 RG 0.566 w 0 0 m 4.8 -4.8 l S Q q 0.9606 0 0 0.9606 96.3787387 410.9320725 cm 1 0 0 RG 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RG 0.566 w 0 0 m 4.8 4.8 l S Q q 0.9606 0 0 0.9606 103.2950326 416.6956532 cm 1 0 0 RG 0.566 w 0 0 m 0 -6.78 l S Q q 0.9606 0 0 0.9606 100.0674262 413.4104109 cm 1 0 0 RG 0.566 w 0 0 m 6.78 0 l S Q q 0.9606 0 0 0.9606 100.9896022 415.7158412 cm 1 0 0 RG 0.566 w 0 0 m 4.8 -4.8 l S Q q 0.9606 0 0 0.9606 100.9895995 411.1049805 cm 1 0 0 RG 0.566 w 0 0 m 4.8 4.8 l S Q q 0.9606 0 0 0.9606 103.9866619 416.7532892 cm 1 0 0 RG 0.566 w 0 0 m 0 -6.78 l S Q q 0.9606 0 0 0.9606 100.7014195 413.4680469 cm 1 0 0 RG 0.566 w 0 0 m 6.78 0 l S Q q 0.9606 0 0 0.9606 101.6812315 415.7734772 cm 1 0 0 RG 0.566 w 0 0 m 4.8 -4.8 l S Q q 0.9606 0 0 0.9606 101.6812287 411.1626165 cm 1 0 0 RG 0.566 w 0 0 m 4.8 4.8 l S Q q 0.9606 0 0 0.9606 104.6206551 416.6956532 cm 1 0 0 RG 0.566 w 0 0 m 0 -6.78 l S Q q 0.9606 0 0 0.9606 101.3930487 413.4680469 cm 1 0 0 RG 0.566 w 0 0 m 6.78 0 l S Q q 0.9606 0 0 0.9606 102.3152247 415.7734772 cm 1 0 0 RG 0.566 w 0 0 m 4.8 -4.8 l S Q q 0.9606 0 0 0.9606 102.315222 411.1626165 cm 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411.2202525 cm 1 0 0 RG 0.566 w 0 0 m 4.8 4.8 l S Q q 0.9606 0 0 0.9606 107.2719001 416.7532892 cm 1 0 0 RG 0.566 w 0 0 m 0 -6.78 l S Q q 0.9606 0 0 0.9606 104.0442937 413.4680469 cm 1 0 0 RG 0.566 w 0 0 m 6.78 0 l S Q q 0.9606 0 0 0.9606 104.9664697 415.7734772 cm 1 0 0 RG 0.566 w 0 0 m 4.8 -4.8 l S Q q 0.9606 0 0 0.9606 104.966467 411.1626165 cm 1 0 0 RG 0.566 w 0 0 m 4.8 4.8 l S Q q 0.9606 0 0 0.9606 107.9635294 416.8685612 cm 1 0 0 RG 0.566 w 0 0 m 0 -6.78 l S Q q 0.9606 0 0 0.9606 104.678287 413.5833189 cm 1 0 0 RG 0.566 w 0 0 m 6.78 0 l S Q q 0.9606 0 0 0.9606 105.658099 415.8887492 cm 1 0 0 RG 0.566 w 0 0 m 4.8 -4.8 l S Q q 0.9606 0 0 0.9606 105.6580962 411.2778885 cm 1 0 0 RG 0.566 w 0 0 m 4.8 4.8 l S Q q 0.9606 0 0 0.9606 108.5975225 416.7532892 cm 1 0 0 RG 0.566 w 0 0 m 0 -6.78 l S Q q 0.9606 0 0 0.9606 105.3699162 413.4680469 cm 1 0 0 RG 0.566 w 0 0 m 6.78 0 l S Q q 0.9606 0 0 0.9606 106.2920922 415.7734772 cm 1 0 0 RG 0.566 w 0 0 m 4.8 -4.8 l S Q q 0.9606 0 0 0.9606 106.2920895 411.1626165 cm 1 0 0 RG 0.566 w 0 0 m 4.8 4.8 l S Q q 0.9606 0 0 0.9606 109.2891519 416.7532892 cm 1 0 0 RG 0.566 w 0 0 m 0 -6.78 l S Q q 0.9606 0 0 0.9606 106.0039095 413.5256829 cm 1 0 0 RG 0.566 w 0 0 m 6.78 0 l S Q q 0.9606 0 0 0.9606 106.9837215 415.8311132 cm 1 0 0 RG 0.566 w 0 0 m 4.8 -4.8 l S Q q 0.9606 0 0 0.9606 106.9837186 411.2202525 cm 1 0 0 RG 0.566 w 0 0 m 4.8 4.8 l S Q q 0.9606 0 0 0.9606 109.923145 416.8685612 cm 1 0 0 RG 0.566 w 0 0 m 0 -6.78 l S Q q 0.9606 0 0 0.9606 106.6955386 413.5833189 cm 1 0 0 RG 0.566 w 0 0 m 6.78 0 l S Q q 0.9606 0 0 0.9606 107.6177146 415.8887492 cm 1 0 0 RG 0.566 w 0 0 m 4.8 -4.8 l S Q q 0.9606 0 0 0.9606 107.617712 411.2778885 cm 1 0 0 RG 0.566 w 0 0 m 4.8 4.8 l S Q q 0.9606 0 0 0.9606 110.6147744 416.8685612 cm 1 0 0 RG 0.566 w 0 0 m 0 -6.78 l S Q q 0.9606 0 0 0.9606 107.329532 413.6409549 cm 1 0 0 RG 0.566 w 0 0 m 6.78 0 l S Q q 0.9606 0 0 0.9606 108.309344 415.9463852 cm 1 0 0 RG 0.566 w 0 0 m 4.8 -4.8 l S Q q 0.9606 0 0 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S Q q 0.9606 0 0 0.9606 112.2862086 411.4507965 cm 1 0 0 RG 0.566 w 0 0 m 4.8 4.8 l S Q q 0.9606 0 0 0.9606 115.225635 417.1567412 cm 1 0 0 RG 0.566 w 0 0 m 0 -6.78 l S Q q 0.9606 0 0 0.9606 111.9980286 413.8714989 cm 1 0 0 RG 0.566 w 0 0 m 6.78 0 l S Q q 0.9606 0 0 0.9606 112.9202046 416.1769292 cm 1 0 0 RG 0.566 w 0 0 m 4.8 -4.8 l S Q q 0.9606 0 0 0.9606 112.920202 411.5660685 cm 1 0 0 RG 0.566 w 0 0 m 4.8 4.8 l S Q q 0.9606 0 0 0.9606 115.9172644 417.1567412 cm 1 0 0 RG 0.566 w 0 0 m 0 -6.78 l S Q q 0.9606 0 0 0.9606 112.632022 413.8714989 cm 1 0 0 RG 0.566 w 0 0 m 6.78 0 l S Q q 0.9606 0 0 0.9606 113.611834 416.1769292 cm 1 0 0 RG 0.566 w 0 0 m 4.8 -4.8 l S Q q 0.9606 0 0 0.9606 113.6118311 411.5660685 cm 1 0 0 RG 0.566 w 0 0 m 4.8 4.8 l S Q q 0.9606 0 0 0.9606 116.5512575 417.1567412 cm 1 0 0 RG 0.566 w 0 0 m 0 -6.78 l S Q q 0.9606 0 0 0.9606 113.2660151 413.8714989 cm 1 0 0 RG 0.566 w 0 0 m 6.84 0 l S Q q 0.9606 0 0 0.9606 114.2458271 416.1769292 cm 1 0 0 RG 0.566 w 0 0 m 4.8 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3.24 l 80.58 3.18 l 80.64 3.18 l 80.7 3.12 l 80.76 3.12 l 80.76 3.06 l 80.82 3.06 l 80.82 3 l 80.94 3 l 80.94 2.94 l 81 2.94 l 81 2.88 l 81.12 2.88 l 81.12 2.82 l 81.18 2.82 l 81.18 2.76 l 81.24 2.76 l 81.3 2.7 l 81.36 2.7 l 81.36 2.64 l 81.48 2.64 l 81.48 2.58 l 81.54 2.58 l 81.54 2.52 l 81.6 2.52 l 81.66 2.46 l 81.72 2.46 l 81.72 2.4 l 81.78 2.4 l 81.84 2.34 l 81.9 2.34 l 81.9 2.28 l 81.96 2.28 l 81.96 2.22 l 82.08 2.22 l 82.08 2.16 l 82.14 2.16 l 82.14 2.1 l 82.26 2.1 l 82.26 2.04 l 82.32 2.04 l 82.32 1.98 l 82.38 1.98 l 82.44 1.92 l 82.5 1.92 l 82.5 1.86 l 82.56 1.86 l 82.56 1.8 l 82.68 1.8 l 82.68 1.74 l 82.74 1.74 l 82.8 1.68 l 82.86 1.68 l 82.92 1.62 l 83.04 1.62 l 83.04 1.56 l 83.16 1.56 l 83.16 1.5 l 83.28 1.5 l 83.28 1.44 l 83.4 1.44 l 83.46 1.38 l 83.58 1.38 l 83.58 1.32 l 83.7 1.32 l 83.7 1.26 l 83.82 1.26 l 83.88 1.2 l 84 1.2 l 84 1.14 l 84.12 1.14 l 84.12 1.08 l 84.3 1.08 l 84.3 1.02 l 84.42 1.02 l 84.42 0.96 l 84.6 0.96 l 84.6 0.9 l 84.84 0.9 l 84.9 0.84 l 85.14 0.84 l 85.2 0.78 l 85.44 0.78 l 85.44 0.72 l 85.62 0.72 l 85.62 0.66 l 85.8 0.66 l 85.8 0.6 l 85.98 0.6 l 85.98 0.54 l 86.16 0.54 l 86.16 0.48 l 86.34 0.48 l 86.34 0.42 l 87.3 0.42 l 87.3 0.36 l 87.72 0.36 l 87.78 0.3 l 88.14 0.3 l 88.2 0.24 l 88.56 0.24 l 88.56 0.18 l 88.86 0.18 l 88.92 0.12 l 90.3 0.12 l 90.3 0.06 l 91.02 0.06 l S Q q 0.9606 0 0 0.9606 99.0876222 416.4651092 cm 1 0 0 RG 0.566 w 0 0 m 0 -6.72 l S Q q 0.9606 0 0 0.9606 95.8600158 413.2375029 cm 1 0 0 RG 0.566 w 0 0 m 6.78 0 l S Q q 0.9606 0 0 0.9606 96.7821822 415.5429332 cm 1 0 0 RG 0.566 w 0 0 m 4.86 -4.8 l S Q q 0.9606 0 0 0.9606 96.782189 410.9320725 cm 1 0 0 RG 0.566 w 0 0 m 4.86 4.8 l S Q q 0.9606 0 0 0.9606 100.2403394 416.5227452 cm 1 0 0 RG 0.566 w 0 0 m 0 -6.78 l S Q q 0.9606 0 0 0.9606 96.955097 413.2375029 cm 1 0 0 RG 0.566 w 0 0 m 6.78 0 l S Q q 0.9606 0 0 0.9606 97.934909 415.5429332 cm 1 0 0 RG 0.566 w 0 0 m 4.8 -4.8 l S Q q 0.9606 0 0 0.9606 97.9349042 410.9320725 cm 1 0 0 RG 0.566 w 0 0 m 4.8 4.8 l S Q q 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l S Q q 0.9606 0 0 0.9606 104.620657 416.5227452 cm 1 0 0 RG 0.566 w 0 0 m 0 -6.78 l S Q q 0.9606 0 0 0.9606 101.3930506 413.2951389 cm 1 0 0 RG 0.566 w 0 0 m 6.78 0 l S Q q 0.9606 0 0 0.9606 102.3152266 415.6005692 cm 1 0 0 RG 0.566 w 0 0 m 4.8 -4.8 l S Q q 0.9606 0 0 0.9606 102.315222 410.9897085 cm 1 0 0 RG 0.566 w 0 0 m 4.8 4.8 l S Q q 0.9606 0 0 0.9606 105.7157364 416.5227452 cm 1 0 0 RG 0.566 w 0 0 m 0 -6.78 l S Q q 0.9606 0 0 0.9606 102.48813 413.2951389 cm 1 0 0 RG 0.566 w 0 0 m 6.78 0 l S Q q 0.9606 0 0 0.9606 103.410306 415.6005692 cm 1 0 0 RG 0.566 w 0 0 m 4.8 -4.8 l S Q q 0.9606 0 0 0.9606 103.4103015 410.9897085 cm 1 0 0 RG 0.566 w 0 0 m 4.8 4.8 l S Q q 0.9606 0 0 0.9606 106.8684519 416.5227452 cm 1 0 0 RG 0.566 w 0 0 m 0 -6.72 l S Q q 0.9606 0 0 0.9606 103.5832095 413.2951389 cm 1 0 0 RG 0.566 w 0 0 m 6.78 0 l S Q q 0.9606 0 0 0.9606 104.5630215 415.6005692 cm 1 0 0 RG 0.566 w 0 0 m 4.8 -4.8 l S Q q 0.9606 0 0 0.9606 104.5630167 410.9897085 cm 1 0 0 RG 0.566 w 0 0 m 4.8 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410.9897085 cm 1 0 0 RG 0.566 w 0 0 m 4.8 4.74 l S Q q 0.9606 0 0 0.9606 115.974903 416.5227452 cm 1 0 0 RG 0.566 w 0 0 m 0 -6.78 l S Q q 0.9606 0 0 0.9606 112.6896606 413.2951389 cm 1 0 0 RG 0.566 w 0 0 m 6.78 0 l S Q q 0.9606 0 0 0.9606 113.6694726 415.6005692 cm 1 0 0 RG 0.566 w 0 0 m 4.8 -4.8 l S Q q 0.9606 0 0 0.9606 113.6694669 410.9897085 cm 1 0 0 RG 0.566 w 0 0 m 4.8 4.8 l S Q q 0.9606 0 0 0.9606 117.3581613 416.5227452 cm 1 0 0 RG 0.566 w 0 0 m 0 -6.78 l S Q q 0.9606 0 0 0.9606 114.0729189 413.2951389 cm 1 0 0 RG 0.566 w 0 0 m 6.78 0 l S Q q 0.9606 0 0 0.9606 114.9950949 415.6005692 cm 1 0 0 RG 0.566 w 0 0 m 4.86 -4.8 l S Q q 0.9606 0 0 0.9606 114.9950894 410.9897085 cm 1 0 0 RG 0.566 w 0 0 m 4.86 4.8 l S Q q 0.9606 0 0 0.9606 118.6837838 416.5227452 cm 1 0 0 RG 0.566 w 0 0 m 0 -6.78 l S Q q 0.9606 0 0 0.9606 115.4561774 413.2951389 cm 1 0 0 RG 0.566 w 0 0 m 6.78 0 l S Q q 0.9606 0 0 0.9606 116.3783534 415.6005692 cm 1 0 0 RG 0.566 w 0 0 m 4.8 -4.8 l S Q q 0.9606 0 0 0.9606 116.3783476 410.9897085 cm 1 0 0 RG 0.566 w 0 0 m 4.8 4.8 l S Q q 0.9606 0 0 0.9606 120.067042 416.5227452 cm 1 0 0 RG 0.566 w 0 0 m 0 -6.78 l S Q q 0.9606 0 0 0.9606 116.8394356 413.2951389 cm 1 0 0 RG 0.566 w 0 0 m 6.78 0 l S Q q 0.9606 0 0 0.9606 117.7616116 415.6005692 cm 1 0 0 RG 0.566 w 0 0 m 4.8 -4.8 l S Q q 0.9606 0 0 0.9606 117.7616059 410.9897085 cm 1 0 0 RG 0.566 w 0 0 m 4.8 4.8 l S Q q 0.9606 0 0 0.9606 121.4503003 416.5227452 cm 1 0 0 RG 0.566 w 0 0 m 0 -6.78 l S Q q 0.9606 0 0 0.9606 118.2226939 413.2951389 cm 1 0 0 RG 0.566 w 0 0 m 6.78 0 l S Q q 0.9606 0 0 0.9606 119.1448699 415.6005692 cm 1 0 0 RG 0.566 w 0 0 m 4.8 -4.8 l S Q q 0.9606 0 0 0.9606 119.1448641 410.9897085 cm 1 0 0 RG 0.566 w 0 0 m 4.8 4.8 l S Q q 0.9606 0 0 0.9606 122.8335585 416.5803812 cm 1 0 0 RG 0.566 w 0 0 m 0 -6.78 l S Q q 0.9606 0 0 0.9606 119.6059521 413.2951389 cm 1 0 0 RG 0.566 w 0 0 m 6.78 0 l S Q q 0.9606 0 0 0.9606 120.5281281 415.6005692 cm 1 0 0 RG 0.566 w 0 0 m 4.8 -4.8 l S Q q 0.9606 0 0 0.9606 120.5281224 410.9897085 cm 1 0 0 RG 0.566 w 0 0 m 4.8 4.8 l S Q q 0.9606 0 0 0.9606 124.2168168 416.5227452 cm 1 0 0 RG 0.566 w 0 0 m 0 -6.72 l S Q q 0.9606 0 0 0.9606 120.9892104 413.2951389 cm 1 0 0 RG 0.566 w 0 0 m 6.78 0 l S Q q 0.9606 0 0 0.9606 121.9113864 415.6005692 cm 1 0 0 RG 0.566 w 0 0 m 4.8 -4.8 l S Q q 0.9606 0 0 0.9606 121.9113806 410.9897085 cm 1 0 0 RG 0.566 w 0 0 m 4.8 4.8 l S Q q 0.9606 0 0 0.9606 125.600075 416.5803812 cm 1 0 0 RG 0.566 w 0 0 m 0 -6.78 l S Q q 0.9606 0 0 0.9606 122.3724686 413.2951389 cm 1 0 0 RG 0.566 w 0 0 m 6.78 0 l S Q q 0.9606 0 0 0.9606 123.2946446 415.6005692 cm 1 0 0 RG 0.566 w 0 0 m 4.8 -4.8 l S Q q 0.9606 0 0 0.9606 123.2946389 410.9897085 cm 1 0 0 RG 0.566 w 0 0 m 4.8 4.8 l S Q q 0.9606 0 0 0.9606 126.9833333 416.5803812 cm 1 0 0 RG 0.566 w 0 0 m 0 -6.78 l S Q q 0.9606 0 0 0.9606 123.6980909 413.2951389 cm 1 0 0 RG 0.566 w 0 0 m 6.84 0 l S Q q 0.9606 0 0 0.9606 124.6779029 415.6005692 cm 1 0 0 RG 0.566 w 0 0 m 4.8 -4.74 l S Q q 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l S Q q 0.9606 0 0 0.9606 128.8276719 411.0473445 cm 1 0 0 RG 0.566 w 0 0 m 4.8 4.8 l S Q q 0.9606 0 0 0.9606 132.5163663 416.5803812 cm 1 0 0 RG 0.566 w 0 0 m 0 -6.78 l S Q q 0.9606 0 0 0.9606 129.2311239 413.3527749 cm 1 0 0 RG 0.566 w 0 0 m 6.78 0 l S Q q 0.9606 0 0 0.9606 130.2109359 415.6582052 cm 1 0 0 RG 0.566 w 0 0 m 4.8 -4.8 l S Q q 0.9606 0 0 0.9606 130.2109302 411.0473445 cm 1 0 0 RG 0.566 w 0 0 m 4.8 4.8 l S Q q 0.9606 0 0 0.9606 133.8996246 416.5803812 cm 1 0 0 RG 0.566 w 0 0 m 0 -6.72 l S Q q 0.9606 0 0 0.9606 130.6143822 413.3527749 cm 1 0 0 RG 0.566 w 0 0 m 6.78 0 l S Q q 0.9606 0 0 0.9606 131.5941942 415.6582052 cm 1 0 0 RG 0.566 w 0 0 m 4.8 -4.8 l S Q q 0.9606 0 0 0.9606 131.5941884 411.0473445 cm 1 0 0 RG 0.566 w 0 0 m 4.8 4.8 l S Q q 0.9606 0 0 0.9606 135.2828828 416.5803812 cm 1 0 0 RG 0.566 w 0 0 m 0 -6.78 l S Q q 0.9606 0 0 0.9606 131.9976404 413.3527749 cm 1 0 0 RG 0.566 w 0 0 m 6.78 0 l S Q q 0.9606 0 0 0.9606 132.9774524 415.6582052 cm 1 0 0 RG 0.566 w 0 0 m 4.8 -4.8 l S Q q 0.9606 0 0 0.9606 132.9774467 411.0473445 cm 1 0 0 RG 0.566 w 0 0 m 4.8 4.8 l S Q q 0.9606 0 0 0.9606 136.6661411 416.6380172 cm 1 0 0 RG 0.566 w 0 0 m 0 -6.78 l S Q q 0.9606 0 0 0.9606 133.3808987 413.3527749 cm 1 0 0 RG 0.566 w 0 0 m 6.78 0 l S Q q 0.9606 0 0 0.9606 134.3607107 415.6582052 cm 1 0 0 RG 0.566 w 0 0 m 4.8 -4.74 l S Q q 0.9606 0 0 0.9606 134.3607049 411.1049805 cm 1 0 0 RG 0.566 w 0 0 m 4.8 4.74 l S Q q 0.9606 0 0 0.9606 138.0493993 416.6380172 cm 1 0 0 RG 0.566 w 0 0 m 0 -6.78 l S Q q 0.9606 0 0 0.9606 134.7641569 413.3527749 cm 1 0 0 RG 0.566 w 0 0 m 6.78 0 l S Q q 0.9606 0 0 0.9606 135.7439689 415.6582052 cm 1 0 0 RG 0.566 w 0 0 m 4.8 -4.8 l S Q q 0.9606 0 0 0.9606 135.7439632 411.0473445 cm 1 0 0 RG 0.566 w 0 0 m 4.8 4.8 l S Q q 0.9606 0 0 0.9606 139.4326576 416.6380172 cm 1 0 0 RG 0.566 w 0 0 m 0 -6.78 l S Q q 0.9606 0 0 0.9606 136.1474152 413.4104109 cm 1 0 0 RG 0.566 w 0 0 m 6.78 0 l S Q q 0.9606 0 0 0.9606 137.1272272 415.7158412 cm 1 0 0 RG 0.566 w 0 0 m 4.8 -4.8 l S Q q 0.9606 0 0 0.9606 137.1272214 411.1049805 cm 1 0 0 RG 0.566 w 0 0 m 4.8 4.8 l S Q q 0.9606 0 0 0.9606 140.7582798 416.6380172 cm 1 0 0 RG 0.566 w 0 0 m 0 -6.78 l S Q q 0.9606 0 0 0.9606 137.5306734 413.4104109 cm 1 0 0 RG 0.566 w 0 0 m 6.78 0 l S Q q 0.9606 0 0 0.9606 138.4528494 415.7158412 cm 1 0 0 RG 0.566 w 0 0 m 4.86 -4.8 l S Q q 0.9606 0 0 0.9606 138.4528439 411.1049805 cm 1 0 0 RG 0.566 w 0 0 m 4.86 4.8 l S Q q 0.9606 0 0 0.9606 142.1415383 416.6380172 cm 1 0 0 RG 0.566 w 0 0 m 0 -6.78 l S Q q 0.9606 0 0 0.9606 138.9139319 413.4104109 cm 1 0 0 RG 0.566 w 0 0 m 6.78 0 l S Q q 0.9606 0 0 0.9606 139.8361079 415.7158412 cm 1 0 0 RG 0.566 w 0 0 m 4.8 -4.8 l S Q q 0.9606 0 0 0.9606 139.8361022 411.1049805 cm 1 0 0 RG 0.566 w 0 0 m 4.8 4.8 l S Q q 0.9606 0 0 0.9606 143.5247966 416.6956532 cm 1 0 0 RG 0.566 w 0 0 m 0 -6.78 l S Q q 0.9606 0 0 0.9606 140.2971902 413.4104109 cm 1 0 0 RG 0.566 w 0 0 m 6.78 0 l S Q q 0.9606 0 0 0.9606 141.2193662 415.7158412 cm 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415.7734772 cm 1 0 0 RG 0.566 w 0 0 m 4.8 -4.8 l S Q q 0.9606 0 0 0.9606 145.3691352 411.1626165 cm 1 0 0 RG 0.566 w 0 0 m 4.8 4.8 l S Q q 0.9606 0 0 0.9606 149.0578296 416.8109252 cm 1 0 0 RG 0.566 w 0 0 m 0 -6.78 l S Q q 0.9606 0 0 0.9606 145.8302232 413.5833189 cm 1 0 0 RG 0.566 w 0 0 m 6.78 0 l S Q q 0.9606 0 0 0.9606 146.7523992 415.8311132 cm 1 0 0 RG 0.566 w 0 0 m 4.8 -4.74 l S Q q 0.9606 0 0 0.9606 146.7523935 411.2778885 cm 1 0 0 RG 0.566 w 0 0 m 4.8 4.74 l S Q q 0.9606 0 0 0.9606 150.4410879 416.7532892 cm 1 0 0 RG 0.566 w 0 0 m 0 -6.78 l S Q q 0.9606 0 0 0.9606 147.1558455 413.5256829 cm 1 0 0 RG 0.566 w 0 0 m 6.84 0 l S Q q 0.9606 0 0 0.9606 148.1356575 415.8311132 cm 1 0 0 RG 0.566 w 0 0 m 4.8 -4.8 l S Q q 0.9606 0 0 0.9606 148.1356517 411.2202525 cm 1 0 0 RG 0.566 w 0 0 m 4.8 4.8 l S Q q 0.9606 0 0 0.9606 151.8243461 416.8685612 cm 1 0 0 RG 0.566 w 0 0 m 0 -6.78 l S Q q 0.9606 0 0 0.9606 148.5391037 413.5833189 cm 1 0 0 RG 0.566 w 0 0 m 6.84 0 l S Q q 0.9606 0 0 0.9606 149.5189157 415.8887492 cm 1 0 0 RG 0.566 w 0 0 m 4.8 -4.8 l S Q q 0.9606 0 0 0.9606 149.51891 411.2778885 cm 1 0 0 RG 0.566 w 0 0 m 4.8 4.8 l S Q q 0.9606 0 0 0.9606 153.2076044 416.8685612 cm 1 0 0 RG 0.566 w 0 0 m 0 -6.78 l S Q q 0.9606 0 0 0.9606 149.922362 413.5833189 cm 1 0 0 RG 0.566 w 0 0 m 6.84 0 l S Q q 0.9606 0 0 0.9606 150.902174 415.8887492 cm 1 0 0 RG 0.566 w 0 0 m 4.8 -4.8 l S Q q 0.9606 0 0 0.9606 150.9021682 411.2778885 cm 1 0 0 RG 0.566 w 0 0 m 4.8 4.8 l S Q q 0.9606 0 0 0.9606 154.5908626 416.9261972 cm 1 0 0 RG 0.566 w 0 0 m 0 -6.78 l S Q q 0.9606 0 0 0.9606 151.3056202 413.6985909 cm 1 0 0 RG 0.566 w 0 0 m 6.84 0 l S Q q 0.9606 0 0 0.9606 152.2854322 416.0040212 cm 1 0 0 RG 0.566 w 0 0 m 4.8 -4.8 l S Q q 0.9606 0 0 0.9606 152.2854265 411.3931605 cm 1 0 0 RG 0.566 w 0 0 m 4.8 4.8 l S Q q 0.9606 0 0 0.9606 155.9741209 416.9838332 cm 1 0 0 RG 0.566 w 0 0 m 0 -6.78 l S Q q 0.9606 0 0 0.9606 152.6888785 413.6985909 cm 1 0 0 RG 0.566 w 0 0 m 6.78 0 l S Q q 0.9606 0 0 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112.2862144 415.5429332 cm 1 0 0 RG 0.566 w 0 0 m 4.8 -4.8 l S Q q 0.9606 0 0 0.9606 112.2862086 410.9320725 cm 1 0 0 RG 0.566 w 0 0 m 4.8 4.8 l S Q q 0.9606 0 0 0.9606 115.974903 416.5227452 cm 1 0 0 RG 0.566 w 0 0 m 0 -6.78 l S Q q 0.9606 0 0 0.9606 112.6896606 413.2375029 cm 1 0 0 RG 0.566 w 0 0 m 6.78 0 l S Q q 0.9606 0 0 0.9606 113.6694726 415.5429332 cm 1 0 0 RG 0.566 w 0 0 m 4.8 -4.8 l S Q q 0.9606 0 0 0.9606 113.6694669 410.9320725 cm 1 0 0 RG 0.566 w 0 0 m 4.8 4.8 l S Q q 0.9606 0 0 0.9606 117.3581613 416.5227452 cm 1 0 0 RG 0.566 w 0 0 m 0 -6.78 l S Q q 0.9606 0 0 0.9606 114.0729189 413.2375029 cm 1 0 0 RG 0.566 w 0 0 m 6.78 0 l S Q q 0.9606 0 0 0.9606 114.9950949 415.5429332 cm 1 0 0 RG 0.566 w 0 0 m 4.86 -4.74 l S Q q 0.9606 0 0 0.9606 114.9950894 410.9897085 cm 1 0 0 RG 0.566 w 0 0 m 4.86 4.74 l S Q q 0.9606 0 0 0.9606 118.6837838 416.5227452 cm 1 0 0 RG 0.566 w 0 0 m 0 -6.78 l S Q q 0.9606 0 0 0.9606 115.4561774 413.2375029 cm 1 0 0 RG 0.566 w 0 0 m 6.78 0 l S Q q 0.9606 0 0 0.9606 116.3783534 415.5429332 cm 1 0 0 RG 0.566 w 0 0 m 4.8 -4.8 l S Q q 0.9606 0 0 0.9606 116.3783476 410.9320725 cm 1 0 0 RG 0.566 w 0 0 m 4.8 4.8 l S Q q 0.9606 0 0 0.9606 120.067042 416.5227452 cm 1 0 0 RG 0.566 w 0 0 m 0 -6.78 l S Q q 0.9606 0 0 0.9606 116.8394356 413.2375029 cm 1 0 0 RG 0.566 w 0 0 m 6.78 0 l S Q q 0.9606 0 0 0.9606 117.7616116 415.5429332 cm 1 0 0 RG 0.566 w 0 0 m 4.8 -4.8 l S Q q 0.9606 0 0 0.9606 117.7616059 410.9320725 cm 1 0 0 RG 0.566 w 0 0 m 4.8 4.8 l S Q q 0.9606 0 0 0.9606 121.4503003 416.5227452 cm 1 0 0 RG 0.566 w 0 0 m 0 -6.78 l S Q q 0.9606 0 0 0.9606 118.2226939 413.2375029 cm 1 0 0 RG 0.566 w 0 0 m 6.78 0 l S Q q 0.9606 0 0 0.9606 119.1448699 415.5429332 cm 1 0 0 RG 0.566 w 0 0 m 4.8 -4.8 l S Q q 0.9606 0 0 0.9606 119.1448641 410.9320725 cm 1 0 0 RG 0.566 w 0 0 m 4.8 4.8 l S Q q 0.9606 0 0 0.9606 122.8335585 416.5227452 cm 1 0 0 RG 0.566 w 0 0 m 0 -6.78 l S Q q 0.9606 0 0 0.9606 119.6059521 413.2951389 cm 1 0 0 RG 0.566 w 0 0 m 6.78 0 l S Q q 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166.924907 415.6582052 cm 1 0 0 RG 0.566 w 0 0 m 4.8 -4.8 l S Q q 0.9606 0 0 0.9606 166.9249097 411.0473445 cm 1 0 0 RG 0.566 w 0 0 m 4.8 4.8 l S Q q 0.9606 0 0 0.9606 170.8441481 416.6380172 cm 1 0 0 RG 0.566 w 0 0 m 0 -6.78 l S Q q 0.9606 0 0 0.9606 167.6165417 413.3527749 cm 1 0 0 RG 0.566 w 0 0 m 6.78 0 l S Q q 0.9606 0 0 0.9606 168.5387081 415.6582052 cm 1 0 0 RG 0.566 w 0 0 m 4.8 -4.8 l S Q q 0.9606 0 0 0.9606 168.538711 411.0473445 cm 1 0 0 RG 0.566 w 0 0 m 4.8 4.8 l S Q q 0.9606 0 0 0.9606 172.5155854 416.5803812 cm 1 0 0 RG 0.566 w 0 0 m 0 -6.78 l S Q q 0.9606 0 0 0.9606 169.287979 413.3527749 cm 1 0 0 RG 0.566 w 0 0 m 6.78 0 l S Q q 0.9606 0 0 0.9606 170.2101454 415.6582052 cm 1 0 0 RG 0.566 w 0 0 m 4.8 -4.8 l S Q q 0.9606 0 0 0.9606 170.210148 411.0473445 cm 1 0 0 RG 0.566 w 0 0 m 4.8 4.8 l S Q q 0.9606 0 0 0.9606 174.1870224 416.6380172 cm 1 0 0 RG 0.566 w 0 0 m 0 -6.78 l S Q q 0.9606 0 0 0.9606 170.90178 413.4104109 cm 1 0 0 RG 0.566 w 0 0 m 6.78 0 l S Q q 0.9606 0 0 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-7.1543 20.10398 cm 403.8 573.48 -0.42 160.14 re W n q 0.149 0.149 0.149 rg 1.32001 0 0 161.63933 402.77833 572.63763 cm /Im25 Do Q Q q 0.9606 0 0 0.9606 -7.1543 20.10398 cm 445.92 573.48 -0.42 160.14 re W n q 0.149 0.149 0.149 rg 1.32001 0 0 161.63933 444.89815 572.63763 cm /Im26 Do Q Q q 0.9606 0 0 0.9606 -7.1543 20.10398 cm 488.04 573.48 -0.42 160.14 re W n q 0.149 0.149 0.149 rg 1.32001 0 0 161.63933 487.01797 572.63763 cm /Im27 Do Q Q q 0.9606 0 0 0.9606 -7.1543 20.10398 cm 530.16 573.48 -0.36 160.14 re W n q 0.149 0.149 0.149 rg 1.32001 0 0 161.63933 529.1378 572.63763 cm /Im28 Do Q Q q 0.9606 0 0 0.9606 -7.1543 20.10398 cm 572.28 573.48 -0.36 160.14 re W n q 0.149 0.149 0.149 rg 1.32001 0 0 161.63933 571.25762 572.63763 cm /Im29 Do Q Q q 0.9606 0 0 0.9606 -7.1543 20.10398 cm 572.1 573.24 -210.66 0.42 re W n q 0.149 0.149 0.149 rg 211.55912 0 0 1.32001 360.8385 572.93762 cm /Im30 Do Q Q q 0.9606 0 0 0.9606 -7.1543 20.10398 cm 572.1 591.06 -210.66 0.42 re W n q 0.149 0.149 0.149 rg 211.55912 0 0 1.32001 360.8385 590.75754 cm /Im31 Do Q Q q 0.9606 0 0 0.9606 -7.1543 20.10398 cm 572.1 608.88 -210.66 0.36 re W n q 0.149 0.149 0.149 rg 211.55912 0 0 1.32001 360.8385 608.57747 cm /Im32 Do Q Q q 0.9606 0 0 0.9606 -7.1543 20.10398 cm 572.1 626.64 -210.66 0.42 re W n q 0.149 0.149 0.149 rg 211.55912 0 0 1.32001 360.8385 626.3374 cm /Im33 Do Q Q q 0.9606 0 0 0.9606 -7.1543 20.10398 cm 572.1 644.46 -210.66 0.36 re W n q 0.149 0.149 0.149 rg 211.55912 0 0 1.32001 360.8385 644.15732 cm /Im34 Do Q Q q 0.9606 0 0 0.9606 -7.1543 20.10398 cm 572.1 662.22 -210.66 0.42 re W n q 0.149 0.149 0.149 rg 211.55912 0 0 1.32001 360.8385 661.91725 cm /Im35 Do Q Q q 0.9606 0 0 0.9606 -7.1543 20.10398 cm 572.1 680.04 -210.66 0.42 re W n q 0.149 0.149 0.149 rg 211.55912 0 0 1.32001 360.8385 679.73719 cm /Im36 Do Q Q q 0.9606 0 0 0.9606 -7.1543 20.10398 cm 572.1 697.86 -210.66 0.36 re W n q 0.149 0.149 0.149 rg 211.55912 0 0 1.32001 360.8385 697.55711 cm /Im37 Do Q Q q 0.9606 0 0 0.9606 -7.1543 20.10398 cm 572.1 715.62 -210.66 0.42 re W n q 0.149 0.149 0.149 rg 211.55912 0 0 1.32001 360.8385 715.31704 cm /Im38 Do Q Q q 0.9606 0 0 0.9606 -7.1543 20.10398 cm 572.1 733.44 -210.66 0.36 re W n q 0.149 0.149 0.149 rg 211.55912 0 0 1.32001 360.8385 733.13695 cm /Im39 Do Q Q q 0.9606 0 0 0.9606 -7.1543 20.10398 cm 0.149 0.149 0.149 rg 361.44 573.24 210.84 0.42 re f Q q 0.9606 0 0 0.9606 -7.1543 20.10398 cm 0.149 0.149 0.149 rg 361.26 573.48 0.36 2.28 re f Q q 0.9606 0 0 0.9606 -7.1543 20.10398 cm 0.149 0.149 0.149 rg 403.38 573.48 0.42 2.28 re f Q q 0.9606 0 0 0.9606 -7.1543 20.10398 cm 0.149 0.149 0.149 rg 445.5 573.48 0.42 2.28 re f Q q 0.9606 0 0 0.9606 -7.1543 20.10398 cm 0.149 0.149 0.149 rg 487.62 573.48 0.42 2.28 re f Q q 0.9606 0 0 0.9606 -7.1543 20.10398 cm 0.149 0.149 0.149 rg 529.8 573.48 0.36 2.28 re f Q q 0.9606 0 0 0.9606 -7.1543 20.10398 cm 0.149 0.149 0.149 rg 571.92 573.48 0.36 2.28 re f Q BT 0.148 g /TT1 1 Tf 4.8026 Tc 0 Tw 7.5503 0 0 7.5503 337.7971 560.0957 Tm [(02468)259.5 (1)4809.1 (0)]TJ -0.0004 Tc 8.2996 0 0 8.2996 423.3865 549.1448 Tm (Depth )Tj 0 Tc (\(A\))Tj ET q 0.9606 0 0 0.9606 525.4577666 548.3357107 cm 0.149 0.149 0.149 rg 0 0 m 0 0.06 0 0.06 0 0.12 c 1.68 1.74 l 0 3.42 l 0 3.48 0 3.54 v 0 3.6 l 0.06 3.66 0.12 3.66 y 0.18 3.66 0.24 3.66 0.24 3.6 c 1.92 1.98 l 3.54 3.6 l 3.6 3.66 3.6 3.66 3.66 3.66 c 3.72 3.66 3.72 3.66 3.78 3.6 c 3.84 3.54 l 3.84 3.48 3.78 3.42 y 2.1 1.74 l 3.78 0.12 l 3.78 0.06 3.84 0.06 3.84 0 c 3.84 -0.06 3.78 -0.06 3.78 -0.12 c 3.72 -0.12 3.72 -0.18 3.66 -0.18 c 3.6 -0.18 3.6 -0.12 3.54 -0.12 c 1.92 1.56 l 0.24 -0.12 l 0.18 -0.18 0.12 -0.18 v 0.06 -0.12 0 -0.12 v 0 -0.06 0 -0.06 0 0 c f Q BT -0.0065 Tc 7.5503 0 0 7.5503 530.5318 548.165 Tm (10)Tj 0 Tc 6.0518 0 0 6.0518 539.0043 551.5079 Tm (4)Tj ET q 0.9606 0 0 0.9606 -7.1543 20.10398 cm 0.149 0.149 0.149 rg 361.26 573.48 0.36 160.32 re f Q q 0.9606 0 0 0.9606 -7.1543 20.10398 cm 0.149 0.149 0.149 rg 361.44 573.24 2.28 0.42 re f Q q 0.9606 0 0 0.9606 -7.1543 20.10398 cm 0.149 0.149 0.149 rg 361.44 591.06 2.28 0.42 re f Q q 0.9606 0 0 0.9606 -7.1543 20.10398 cm 0.149 0.149 0.149 rg 361.44 608.88 2.28 0.36 re f Q q 0.9606 0 0 0.9606 -7.1543 20.10398 cm 0.149 0.149 0.149 rg 361.44 626.64 2.28 0.42 re f Q q 0.9606 0 0 0.9606 -7.1543 20.10398 cm 0.149 0.149 0.149 rg 361.44 644.46 2.28 0.36 re f Q q 0.9606 0 0 0.9606 -7.1543 20.10398 cm 0.149 0.149 0.149 rg 361.44 662.22 2.28 0.42 re f Q q 0.9606 0 0 0.9606 -7.1543 20.10398 cm 0.149 0.149 0.149 rg 361.44 680.04 2.28 0.42 re f Q q 0.9606 0 0 0.9606 -7.1543 20.10398 cm 0.149 0.149 0.149 rg 361.44 697.86 2.28 0.36 re f Q q 0.9606 0 0 0.9606 -7.1543 20.10398 cm 0.149 0.149 0.149 rg 361.44 715.62 2.28 0.42 re f Q q 0.9606 0 0 0.9606 -7.1543 20.10398 cm 0.149 0.149 0.149 rg 361.44 733.44 2.28 0.36 re f Q BT 7.5503 0 0 7.5503 332.4946 567.8765 Tm (0)Tj 0 2.267 TD (1)Tj 0 2.26 TD (2)Tj 0 2.267 TD (3)Tj T* (4)Tj 0 2.26 TD (5)Tj 0 2.267 TD (6)Tj 0 2.26 TD (7)Tj 0 2.267 TD (8)Tj T* (9)Tj ET q 0.149 0.149 0.149 rg 5.07195 0 0 -80.57479 321.9459 694.61528 cm /Im40 Do Q q 0.149 0.149 0.149 rg 2.76652 0 0 -80.57479 327.01784 694.61528 cm /Im41 Do Q q 0.149 0.149 0.149 rg 5.07195 0 0 -80.57479 321.9459 614.0405 cm /Im42 Do Q q 0.149 0.149 0.149 rg 2.76652 0 0 -80.57479 327.01784 614.0405 cm /Im43 Do Q q 0.9606 0 0 0.9606 341.19623 727.00657 cm 0.149 0.149 0.149 rg 0 0 m 0 0.06 l 1.68 1.74 l 0 3.36 l 0 3.42 0 3.42 0 3.48 c 0 3.54 0 3.54 0 3.6 c 0.06 3.66 0.06 3.66 0.12 3.66 c 0.18 3.66 0.18 3.66 0.24 3.6 c 1.92 1.98 l 3.54 3.6 l 3.6 3.66 3.6 3.66 3.66 3.66 c 3.72 3.66 3.72 3.66 3.78 3.6 c 3.78 3.54 3.84 3.54 3.84 3.48 c 3.84 3.42 3.78 3.42 3.78 3.36 c 2.1 1.74 l 3.78 0.06 l 3.84 0 l 3.84 -0.06 3.78 -0.12 y 3.72 -0.18 3.72 -0.18 3.66 -0.18 c 3.6 -0.18 3.6 -0.18 3.54 -0.12 c 1.92 1.5 l 0.24 -0.12 l 0.24 -0.18 0.18 -0.18 0.12 -0.18 c 0.06 -0.18 0.06 -0.18 0 -0.12 c 0 -0.06 0 0 v f Q BT -0.0142 Tc 7.5503 0 0 7.5503 346.2696 726.779 Tm (10)Tj 0 Tc 6.0518 0 0 6.0518 354.7421 730.1795 Tm [(1)4 (8)]TJ 0 g /TT2 1 Tf -0.0001 Tw 8.2996 0 0 8.2996 381.5428 728.681 Tm [(A)27.7 (utomatic profile optimizatio)]TJ 0 Tw 13.75 0 Td (n)Tj ET q 0.9606 0 0 0.9606 340.0435196 570.9865808 cm 0 0 0 RG 0.392 w 1 j 0 0 m 21.06 0 l 21.06 106.74 l 84.18 106.74 l 84.24 71.16 l 126.36 71.16 l 126.42 0 l 210.66 0 l S Q q 0.9606 0 0 0.9606 340.0435249 573.2343848 cm 0 0 0 RG 0.392 w 0 0 m 0 -4.74 l S Q q 0.9606 0 0 0.9606 337.7957305 570.9865808 cm 0 0 0 RG 0.392 w 0 0 m 4.68 0 l S Q q 0.9606 0 0 0.9606 340.2164233 573.2343848 cm 0 0 0 RG 0.392 w 0 0 m 0 -4.74 l S Q q 0.9606 0 0 0.9606 337.9110025 570.9865808 cm 0 0 0 RG 0.392 w 0 0 m 4.74 0 l S Q q 0.9606 0 0 0.9606 340.3317049 573.2343848 cm 0 0 0 RG 0.392 w 0 0 m 0 -4.74 l S Q q 0.9606 0 0 0.9606 338.0839009 570.9865808 cm 0 0 0 RG 0.392 w 0 0 m 4.68 0 l S Q q 0.9606 0 0 0.9606 340.4469769 573.2343848 cm 0 0 0 RG 0.392 w 0 0 m 0 -4.74 l S Q q 0.9606 0 0 0.9606 338.1991825 570.9865808 cm 0 0 0 RG 0.392 w 0 0 m 4.74 0 l S Q q 0.9606 0 0 0.9606 340.6198753 573.2343848 cm 0 0 0 RG 0.392 w 0 0 m 0 -4.74 l S Q q 0.9606 0 0 0.9606 338.3720809 570.9865808 cm 0 0 0 RG 0.392 w 0 0 m 4.68 0 l S Q q 0.9606 0 0 0.9606 340.7351569 573.2343848 cm 0 0 0 RG 0.392 w 0 0 m 0 -4.74 l S Q q 0.9606 0 0 0.9606 338.4873625 570.9865808 cm 0 0 0 RG 0.392 w 0 0 m 4.74 0 l S Q q 0.9606 0 0 0.9606 340.9080553 573.2343848 cm 0 0 0 RG 0.392 w 0 0 m 0 -4.74 l S Q q 0.9606 0 0 0.9606 338.6602609 570.9865808 cm 0 0 0 RG 0.392 w 0 0 m 4.68 0 l S Q q 0.9606 0 0 0.9606 341.0233369 573.2343848 cm 0 0 0 RG 0.392 w 0 0 m 0 -4.74 l S Q q 0.9606 0 0 0.9606 338.7755233 570.9865808 cm 0 0 0 RG 0.392 w 0 0 m 4.74 0 l S Q q 0.9606 0 0 0.9606 341.1962449 573.2343848 cm 0 0 0 RG 0.392 w 0 0 m 0 -4.74 l S Q q 0.9606 0 0 0.9606 338.9484409 570.9865808 cm 0 0 0 RG 0.392 w 0 0 m 4.68 0 l S Q q 0.9606 0 0 0.9606 341.3115073 573.2343848 cm 0 0 0 RG 0.392 w 0 0 m 0 -4.74 l S Q q 0.9606 0 0 0.9606 339.0637129 570.9865808 cm 0 0 0 RG 0.392 w 0 0 m 4.68 0 l S Q q 0.9606 0 0 0.9606 341.4844249 573.2343848 cm 0 0 0 RG 0.392 w 0 0 m 0 -4.74 l S Q q 0.9606 0 0 0.9606 339.1789753 570.9865808 cm 0 0 0 RG 0.392 w 0 0 m 4.74 0 l S Q q 0.9606 0 0 0.9606 341.5996873 573.2343848 cm 0 0 0 RG 0.392 w 0 0 m 0 -4.74 l S Q q 0.9606 0 0 0.9606 339.3518929 570.9865808 cm 0 0 0 RG 0.392 w 0 0 m 4.68 0 l S Q q 0.9606 0 0 0.9606 341.7725953 573.2343848 cm 0 0 0 RG 0.392 w 0 0 m 0 -4.74 l S Q q 0.9606 0 0 0.9606 339.4671553 570.9865808 cm 0 0 0 RG 0.392 w 0 0 m 4.74 0 l S Q q 0.9606 0 0 0.9606 341.8878673 573.2343848 cm 0 0 0 RG 0.392 w 0 0 m 0 -4.74 l S Q q 0.9606 0 0 0.9606 339.6400729 570.9865808 cm 0 0 0 RG 0.392 w 0 0 m 4.68 0 l S Q q 0.9606 0 0 0.9606 342.0031297 573.2343848 cm 0 0 0 RG 0.392 w 0 0 m 0 -4.74 l S Q q 0.9606 0 0 0.9606 339.7553449 570.9865808 cm 0 0 0 RG 0.392 w 0 0 m 4.74 0 l S Q q 0.9606 0 0 0.9606 342.1760473 573.2343848 cm 0 0 0 RG 0.392 w 0 0 m 0 -4.74 l S Q q 0.9606 0 0 0.9606 339.9282529 570.9865808 cm 0 0 0 RG 0.392 w 0 0 m 4.68 0 l S Q q 0.9606 0 0 0.9606 342.2913193 573.2343848 cm 0 0 0 RG 0.392 w 0 0 m 0 -4.74 l S Q q 0.9606 0 0 0.9606 340.0435249 570.9865808 cm 0 0 0 RG 0.392 w 0 0 m 4.74 0 l S Q q 0.9606 0 0 0.9606 342.4642273 573.2343848 cm 0 0 0 RG 0.392 w 0 0 m 0 -4.74 l S Q q 0.9606 0 0 0.9606 340.2164233 570.9865808 cm 0 0 0 RG 0.392 w 0 0 m 4.68 0 l S Q q 0.9606 0 0 0.9606 342.5794993 573.2343848 cm 0 0 0 RG 0.392 w 0 0 m 0 -4.74 l S Q q 0.9606 0 0 0.9606 340.3317049 570.9865808 cm 0 0 0 RG 0.392 w 0 0 m 4.68 0 l S Q q 0.9606 0 0 0.9606 342.7523977 573.2343848 cm 0 0 0 RG 0.392 w 0 0 m 0 -4.74 l S Q q 0.9606 0 0 0.9606 340.4469769 570.9865808 cm 0 0 0 RG 0.392 w 0 0 m 4.74 0 l S Q q 0.9606 0 0 0.9606 342.8676793 573.2343848 cm 0 0 0 RG 0.392 w 0 0 m 0 -4.74 l S Q q 0.9606 0 0 0.9606 340.6198753 570.9865808 cm 0 0 0 RG 0.392 w 0 0 m 4.68 0 l S Q q 0.9606 0 0 0.9606 343.0405873 573.2343848 cm 0 0 0 RG 0.392 w 0 0 m 0 -4.74 l S Q q 0.9606 0 0 0.9606 340.7351569 570.9865808 cm 0 0 0 RG 0.392 w 0 0 m 4.74 0 l S Q q 0.9606 0 0 0.9606 343.1558497 573.2343848 cm 0 0 0 RG 0.392 w 0 0 m 0 -4.74 l S Q q 0.9606 0 0 0.9606 340.9080553 570.9865808 cm 0 0 0 RG 0.392 w 0 0 m 4.68 0 l S Q q 0.9606 0 0 0.9606 343.3287673 573.2343848 cm 0 0 0 RG 0.392 w 0 0 m 0 -4.74 l S Q q 0.9606 0 0 0.9606 341.0233369 570.9865808 cm 0 0 0 RG 0.392 w 0 0 m 4.74 0 l S Q q 0.9606 0 0 0.9606 343.4440297 573.2343848 cm 0 0 0 RG 0.392 w 0 0 m 0 -4.74 l S Q q 0.9606 0 0 0.9606 341.1962449 570.9865808 cm 0 0 0 RG 0.392 w 0 0 m 4.68 0 l S Q q 0.9606 0 0 0.9606 343.5593113 573.2343848 cm 0 0 0 RG 0.392 w 0 0 m 0 -4.74 l S Q q 0.9606 0 0 0.9606 341.3115073 570.9865808 cm 0 0 0 RG 0.392 w 0 0 m 4.74 0 l S Q q 0.9606 0 0 0.9606 343.7322193 573.2343848 cm 0 0 0 RG 0.392 w 0 0 m 0 -4.74 l S Q q 0.9606 0 0 0.9606 341.4844249 570.9865808 cm 0 0 0 RG 0.392 w 0 0 m 4.68 0 l S Q q 0.9606 0 0 0.9606 343.8474817 573.2343848 cm 0 0 0 RG 0.392 w 0 0 m 0 -4.74 l S Q q 0.9606 0 0 0.9606 341.5996873 570.9865808 cm 0 0 0 RG 0.392 w 0 0 m 4.74 0 l S Q q 0.9606 0 0 0.9606 344.0203993 573.2343848 cm 0 0 0 RG 0.392 w 0 0 m 0 -4.74 l S Q q 0.9606 0 0 0.9606 341.7725953 570.9865808 cm 0 0 0 RG 0.392 w 0 0 m 4.68 0 l S Q q 0.9606 0 0 0.9606 344.1356617 573.2343848 cm 0 0 0 RG 0.392 w 0 0 m 0 -4.74 l S Q q 0.9606 0 0 0.9606 341.8878673 570.9865808 cm 0 0 0 RG 0.392 w 0 0 m 4.68 0 l S Q q 0.9606 0 0 0.9606 344.3085793 573.2343848 cm 0 0 0 RG 0.392 w 0 0 m 0 -4.74 l S Q q 0.9606 0 0 0.9606 342.0031297 570.9865808 cm 0 0 0 RG 0.392 w 0 0 m 4.74 0 l S Q q 0.9606 0 0 0.9606 344.4238513 573.2343848 cm 0 0 0 RG 0.392 w 0 0 m 0 -4.74 l S Q q 0.9606 0 0 0.9606 342.1760473 570.9865808 cm 0 0 0 RG 0.392 w 0 0 m 4.68 0 l S Q q 0.9606 0 0 0.9606 344.5967497 573.2343848 cm 0 0 0 RG 0.392 w 0 0 m 0 -4.74 l S Q q 0.9606 0 0 0.9606 342.2913193 570.9865808 cm 0 0 0 RG 0.392 w 0 0 m 4.74 0 l S Q q 0.9606 0 0 0.9606 344.7120121 573.2343848 cm 0 0 0 RG 0.392 w 0 0 m 0 -4.74 l S Q q 0.9606 0 0 0.9606 342.4642273 570.9865808 cm 0 0 0 RG 0.392 w 0 0 m 4.68 0 l S Q q 0.9606 0 0 0.9606 344.8272841 573.2343848 cm 0 0 0 RG 0.392 w 0 0 m 0 -4.74 l S Q q 0.9606 0 0 0.9606 342.5794993 570.9865808 cm 0 0 0 RG 0.392 w 0 0 m 4.74 0 l S Q q 0.9606 0 0 0.9606 345.0001921 573.2343848 cm 0 0 0 RG 0.392 w 0 0 m 0 -4.74 l S Q q 0.9606 0 0 0.9606 342.7523977 570.9865808 cm 0 0 0 RG 0.392 w 0 0 m 4.68 0 l S Q q 0.9606 0 0 0.9606 345.1154641 573.2343848 cm 0 0 0 RG 0.392 w 0 0 m 0 -4.74 l S Q q 0.9606 0 0 0.9606 342.8676793 570.9865808 cm 0 0 0 RG 0.392 w 0 0 m 4.74 0 l S Q q 0.9606 0 0 0.9606 345.2883625 573.2343848 cm 0 0 0 RG 0.392 w 0 0 m 0 -4.74 l S Q q 0.9606 0 0 0.9606 343.0405873 570.9865808 cm 0 0 0 RG 0.392 w 0 0 m 4.68 0 l S Q q 0.9606 0 0 0.9606 345.4036441 573.2343848 cm 0 0 0 RG 0.392 w 0 0 m 0 -4.74 l S Q q 0.9606 0 0 0.9606 343.1558497 570.9865808 cm 0 0 0 RG 0.392 w 0 0 m 4.74 0 l S Q q 0.9606 0 0 0.9606 345.5765425 573.2343848 cm 0 0 0 RG 0.392 w 0 0 m 0 -4.74 l S Q q 0.9606 0 0 0.9606 343.3287673 570.9865808 cm 0 0 0 RG 0.392 w 0 0 m 4.68 0 l S Q q 0.9606 0 0 0.9606 345.6918241 573.2343848 cm 0 0 0 RG 0.392 w 0 0 m 0 -4.74 l S Q q 0.9606 0 0 0.9606 343.4440297 570.9865808 cm 0 0 0 RG 0.392 w 0 0 m 4.68 0 l S Q q 0.9606 0 0 0.9606 345.8647321 573.2343848 cm 0 0 0 RG 0.392 w 0 0 m 0 -4.74 l S Q q 0.9606 0 0 0.9606 343.5593113 570.9865808 cm 0 0 0 RG 0.392 w 0 0 m 4.74 0 l S Q q 0.9606 0 0 0.9606 345.9799945 573.2343848 cm 0 0 0 RG 0.392 w 0 0 m 0 -4.74 l S Q q 0.9606 0 0 0.9606 343.7322193 570.9865808 cm 0 0 0 RG 0.392 w 0 0 m 4.68 0 l S Q q 0.9606 0 0 0.9606 346.1529121 573.2343848 cm 0 0 0 RG 0.392 w 0 0 m 0 -4.74 l S Q q 0.9606 0 0 0.9606 343.8474817 570.9865808 cm 0 0 0 RG 0.392 w 0 0 m 4.74 0 l S Q q 0.9606 0 0 0.9606 346.2681841 573.2343848 cm 0 0 0 RG 0.392 w 0 0 m 0 -4.74 l S Q q 0.9606 0 0 0.9606 344.0203993 570.9865808 cm 0 0 0 RG 0.392 w 0 0 m 4.68 0 l S Q q 0.9606 0 0 0.9606 346.3834465 573.2343848 cm 0 0 0 RG 0.392 w 0 0 m 0 -4.74 l S Q q 0.9606 0 0 0.9606 344.1356617 570.9865808 cm 0 0 0 RG 0.392 w 0 0 m 4.74 0 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Th)-5.9 (e seco)]TJ 20.178 -0 Td (nd)Tj -0.0016 Tc 0.0876 Tw -22.392 -1.15 Td (ap)Tj 0.946 0 Td [(pro)-5.5 (ach, )6 (MD)-5.4 (, on th)-5.5 (e o)-5.5 (t)6.3 (h)-5.5 (e)-1.7 (r )6 (han)-5.5 (d)0.5 (, )6 (fo)-5.6 (cu)-5.5 (ses )6 (on)-5.5 ( so)-5.6 (l)6.3 (v)-5.6 (ing)-5.5 ( t)6.3 (h)]TJ 22.01 -0 Td (e)Tj -0.0017 Tc -0.0143 Tw -22.956 -1.144 Td (many)Tj 2.22 -0 Td [(-bo)-5.6 (dy N)-5.5 (e)4.2 (w)-5.5 (ton)-5.6 (\222)-4.7 (s)3.5 ( mech)-5.6 (anics [1)-5.6 (2] equ)-5.6 (a)-1.8 (tio)-5.6 (n. )6 (Th)-5.7 (is p)-5.7 (a)4.2 (p)-5.6 (e)]TJ 20.845 0 Td (r)Tj -0.0019 Tc 0.4238 Tw -23.066 -1.15 Td (p)Tj 0.503 0.001 Td [(r)-4.9 (esen)-5.8 (ts a mo)-5.8 (d)-5.8 (e)-2 (ling exp)-5.8 (a)4 (nsio)-5.8 (n app)-5.8 (licatio)-5.8 (n cod)-5.8 (e)4 (d)-5.9 ( )6 (on)]TJ 0.0022 Tc 0.0358 Tw -0.504 -1.144 Td [(MA)4.4 (TLAB)9.3 ( an)4.3 (d)4.3 ( base)8.1 (d )6 (on)4.3 ( SRI)5.2 (M)-2.5 ( )6 (dat)4.1 (a)2.1 ( w)4.4 (h)-1.7 (i)4.1 (c)2.1 (h)4.3 ( )6 (ext)4.1 (r)-0.8 (a)8.1 (pol)4.1 (at)4.1 (es t)4.1 (o)]TJ -0.0004 Tc -0.0216 Tw 0 -1.15 TD [(calcu)-4.3 (late d)-4.3 (i)1.5 (strib)-4.3 (u)-4.3 (tion)-4.3 (s)-1.2 ( )6 (for all )]TJ 0.0002 Tc -0.0222 Tw 11.633 0 Td [(energies of inte)6.1 (rest, cleans )]TJ 10.763 0 Td (up)Tj -0.0012 Tc 0.5371 Tw -22.396 -1.15 Td (in)Tj 0.78 -0 Td [(h)-5.1 (e)4.7 (ren)-5.1 (tly )-6 (no)-5.1 (i)6.7 (s)-2 (y)-5.1 ( SRIM)-5.9 (-g)-5.1 (enerated)-5.1 ( d)-5.1 (a)-1.3 (ta, au)-5.1 (to)-5.1 (matically)]TJ 0.0008 Tc 0.0312 Tw -0.781 -1.144 Td [(optimizes )-6 (the energy, dose, )-6 (a)6.7 (n)]TJ -0.0025 Tc 0.0345 Tw [(d )-6 (nu)-6.4 (mb)-6.4 (er)-5.5 ( o)-6.4 (f)-5.5 ( step)-6.4 (s )-6 (r)-5.5 (e)3.4 (qu)-6.4 (ir)]TJ 22.462 0.001 Td (ed)Tj 0.0004 Tc 0.1576 Tw -22.461 -1.15 Td [(to create a target profile, and finall)8.3 (y models channeling)]TJ 0.0002 Tc 0 Tw 0 -1.15 Td (effects.)Tj 0.003 Tc 0.318 -2.293 Td (I.)Tj 0 Tc 1.482 0 Td (C)Tj 0.0008 Tc 1.2634 Tw 7.651 0 0 7.6656 87.6184 164.828 Tm [(OMPAR)-10.2 (I)2.3 (SON)-7.8 (S)-8 ( AN)-7.8 (D )-7.5 (OPT)-6.1 (I)-5.2 (MIZ)-6.1 (AT)-6.1 (I)2.3 (ON)-7.8 ( O)-7.7 (F )]TJ 0.0017 Tc 0 Tw 9.607 0 0 9.6252 265.1949 164.828 Tm (SRIM)Tj 0 Tc 7.651 0 0 7.6656 288.7104 164.828 Tm ( )Tj 0.0001 Tc -0.0015 Tw -27.119 -1.444 Td [(SIMU)-8.5 (LA)-8.4 (TED)-8.5 ( PR)-10.9 (OFIL)-6.8 (ES U)-8.5 (S)-1.2 (IN)-8.5 (G F)-8.7 (I)1.6 (LT)-6.8 (ERIN)-8.4 (G PROC)-10.9 (ESSIN)-8.5 (G)]TJ 0.0035 Tc 0 Tw 9.607 0 0 9.6252 63.9306 142.7535 Tm (I.)Tj 0.583 -0 Td (1.)Tj /TT3 1 Tf 0 Tc 0.749 0 Td ( )Tj /TT1 1 Tf 0.468 0 Td (Q)Tj 0.0011 Tc 0.6152 Tw 7.651 0 0 7.6656 88.1948 142.7534 Tm [(UICK CALCU)-7.5 (L)1.8 (AT)-5.8 (ION )]TJ /TT2 1 Tf -0.0007 Tc 0 Tw 11.322 0 Td (VS)Tj 0 Tc 9.607 0 0 9.6252 183.3518 142.7534 Tm (.)Tj /TT1 1 Tf 0.0023 Tc 0.614 Tw 7.651 0 0 7.6656 185.7725 142.7534 Tm [( MONOLAY)-6.3 (E)3 (R )-7.5 (COLLISIO)-6.3 (N)]TJ 0.0004 Tc 0 Tw -13.665 -1.444 Td (MOD)Tj 2.342 -0 Td [(E)1.1 (S)]TJ -0.0011 Tc 0.435 Tw 9.607 0 0 9.6252 72.5757 120.6212 Tm (Th)Tj 1.114 -0 Td [(e )6 (SRIM)-5.8 ( co)-5 (d)-5 (e)4.8 ( is )6 (b)-5 (a)-1.2 (sed on)-5 ( t)6.8 (h)-5 (e )6 (b)-5 (i)0.8 (n)-5 (a)4.8 (ry co)]TJ 18.893 0 Td (llision)Tj -0.0008 Tc -0.0452 Tw -20.907 -1.144 Td (ap)Tj 0.948 0 Td [(pro)-4.7 (x)-4.7 (i)1.1 (mation)-4.7 (.)3.2 ( Th)-4.7 (is method)-4.7 ( assu)-4.7 (mes t)7.1 (h)-4.7 (at th)-4.7 (e in)-4.7 (co)-4.7 (mi)7.1 (n)-4.8 (g)-4.7 ( i)7.1 (o)-4.7 (n )]TJ 0.0024 Tc 0.0116 Tw -0.947 -1.15 Td [(l)4.3 (o)-1.5 (ses ene)8.3 (r)-0.6 (g)4.5 (y)-1.5 ( )6 (gr)5.4 (adual)4.3 (l)4.3 (y)-1.5 ( )6 (fr)5.4 (om t)10.3 (h)-1.5 (e el)4.3 (ect)4.3 (ro)4.5 (ni)4.3 (c st)4.3 (op)4.5 (pi)4.3 (n)4.5 (g)-1.5 ( )6 (po)4.5 (wer)11.4 ( )]TJ -0.0022 Tc 0.0942 Tw 26.797 49.575 Td [(o)-6.1 (f)0.8 ( th)-6.1 (e targ)-6.1 (et an)-6.1 (d th)-6.1 (en co)-6.1 (llid)-6.1 (es elastically)-6.1 ( w)-6 (i)5.7 (th)-6.1 ( th)-6.1 (e )6 (n)-6.1 (u)-6.2 (clei. )]TJ -0.0007 Tc 0.2666 Tw 0 -1.144 TD [(A)-4.5 (f)-3.7 (ter co)-4.6 (llisio)-4.6 (n, so)-4.6 (lv)-4.6 (i)7.2 (n)-4.6 (g)-4.6 ( t)7.2 (h)-4.6 (e )6 (classical scatt)-4.8 (e)-0.8 (ring)-4.6 ( in)-4.7 (tegral )]TJ 0.0001 Tc -0.0041 Tw 0 -1.15 TD [(yields the scatt)8 (ering angle an)]TJ -0.0013 Tc -0.0027 Tw 11.591 0 Td [(d)-5.2 ( th)-5.2 (e en)-5.2 (ergy)-5.2 ( lost from th)-5.3 (e i)6.6 (o)-5.3 (n )]TJ -0.001 Tc 0.009 Tw -11.591 -1.15 Td [(an)-4.9 (d)-4.9 ( t)6.9 (h)-4.9 (u)-4.9 (s)-1.8 ( tran)-4.9 (smitted)-4.9 ( to)-4.9 ( th)-5 (e nu)-4.9 (clei. Betw)-4.8 (een co)-5 (llisio)-5 (n)-4.9 (s)-1.8 (, t)6.9 (h)-5 (is )]TJ 0.2729 Tw 0 -1.144 TD [(ap)-4.9 (pro)-4.9 (x)-4.9 (i)0.9 (mation co)-4.9 (nsid)-4.9 (ers a )6 (straig)-4.9 (h)-4.9 (t)0.9 ( )6 (flig)-4.9 (h)-5 (t)6.9 ( p)-4.9 (a)-1.1 (th)-4.9 ( )6 (b)-4.9 (e)-1.1 (tw)-4.8 (een )]TJ -0.0029 Tw 0 -1.15 TD [(n)-5 (u)-5 (c)-1.2 (lei. )]TJ 0.0012 Tc 0.0128 Tw 1.35 -1.15 Td [(SRIM )6 (of)4.2 (fers)6.4 ( se)7.1 (veral)9.1 ( simulation )6 (mo)3.3 (des)6.4 (.)-0.8 ( T)6.1 (h)-2.8 (e)7.1 ( f)4.2 (i)3.1 (rst o)3.3 (n)-2.8 (e)7.1 ( is)6.4 ( )]TJ -0.0005 Tc 0.2065 Tw -1.35 -1.144 Td [(called)-4.4 ( th)-4.4 (e qu)-4.4 (i)7.4 (c)-0.6 (k)-4.4 ( calcu)-4.4 (lation mod)-4.4 (e)-0.6 (. )6 (It is based)-4.4 ( )6 (o)-4.5 (n)-4.4 ( )6 (rap)-4.5 (i)7.4 (d)-4.4 ( )]TJ -0.0009 Tc 0.5368 Tw T* [(statistical esti)-5 (mates )6 (d)-4.8 (e)-1 (ri)7 (v)-4.9 (e)-1 (d from th)-4.8 (e )6 (K)-4.7 (i)1 (n)-4.8 (c)5 (h)-4.8 (i)1 (n-Pease )]TJ 0.0009 Tc 0.979 Tw 0 -1.144 TD [(formalism which uses an )-6 (ene)6.8 (r)-2.1 (gy displaceme)6.8 (n)-3.1 (t )]TJ -0.0014 Tc 0.0514 Tw 0 -1.15 TD [(ap)-5.3 (pro)-5.3 (x)-5.3 (i)0.5 (mation)-5.3 (.)2.6 ( Th)-5.3 (is is briefly o)-5.4 (u)-5.3 (tlin)-5.3 (ed)-5.3 ( in)-5.3 ( Equ)-5.3 (a)-1.5 (tio)-5.4 (n)-5.3 ( )6 (1)-5.3 (.)-3.4 ( )6 (For )]TJ 0.0004 Tc 0.0016 Tw T* [(a dee)6.3 (p)-3.5 (er expla)6.3 (n)-3.5 (ation please)6.3 ( refer t)8.3 (o)-3.5 ( Zie)6.3 (g)-3.5 (ler )]TJ /TT2 1 Tf 17.572 0 Td (et al.)Tj /TT1 1 Tf 0.003 Tc -0.007 Tw [( [4)5.1 (].)7 ( )]TJ 0.0008 Tc 0.1212 Tw -16.222 -1.162 Td [(The )6 (number of )6 (poi)8.7 (nt defects)6 ( or )6 (vaca)6.7 (ncies )]TJ /C2_0 1 Tf 0 Tc 0 Tw 17.632 0 Td <0730>Tj 6.7305 0 0 6.7434 509.9557 441.0773 Tm <0BD7>Tj /TT1 1 Tf -0.0001 Tc 0.1221 Tw 9.607 0 0 9.6252 514.8548 443.0369 Tm ( created )Tj -0.0008 Tc 0.0688 Tw -20.14 -1.156 Td [(in)-4.7 (sid)-4.7 (e)-0.9 ( a targ)-4.7 (et )6 (is d)-4.7 (e)-0.9 (termi)7.1 (n)-4.7 (ed )6 (b)-4.7 (y)1.3 ( wh)-4.7 (eth)-4.7 (e)5.1 (r th)-4.7 (e amp)-4.7 (litud)-4.7 (e)-0.9 ( )6 (o)-4.7 (f)2.2 ( )]TJ -0.0017 Tc 0.3456 Tw 0 -1.144 TD [(th)-5.6 (e en)-5.6 (ergy)-5.6 ( )6 (fro)-5.6 (m)2.2 ( co)-5.6 (llision)-5.7 ( )6 (w)-5.5 (ith)-5.6 ( t)6.2 (h)-5.7 (e primary )6 (k)-5.6 (no)-5.6 (c)4.2 (k)-5.7 (-)1.3 (o)-5.7 (n)6.4 ( )]TJ -0.0005 Tc 0 Tw 0 -1.162 TD [(\()-3.5 (P)-2.3 (KO\))-3.5 (, )]TJ /C2_0 1 Tf 0 Tc 3.378 0 Td <0727>Tj 6.7305 0 0 6.7434 359.2953 407.7637 Tm <0BE9>Tj /TT1 1 Tf 0.0007 Tc 0.2112 Tw 9.607 0 0 9.6252 363.6756 409.7233 Tm [(, is large)6.6 (r)-2.3 ( tha)6.6 (n)-3.2 ( t)8.6 (h)-3.2 (e )5.9 (displaceme)6.6 (n)-3.2 (t )5.9 (energy, )]TJ /C2_0 1 Tf 0 Tc 0 Tw 17.662 0 Td <0727>Tj 6.7305 0 0 6.7434 538.8314 407.7637 Tm <0BD7>Tj /TT1 1 Tf 0.002 Tc 9.607 0 0 9.6252 543.7305 409.7233 Tm (, )Tj 0.0014 Tc -0.0414 Tw -23.146 -1.174 Td [(req)3.5 (u)-2.5 (ire)7.3 (d)-2.5 ( t)9.3 (o)-2.5 ( re)7.3 (m)5.3 (ove)7.3 ( an ato)3.5 (m)-0.7 ( )6 (fr)4.4 (om a)7.3 ( site. )]TJ /C2_0 1 Tf 0 Tc 0 Tw 15.736 0 Td <0727>Tj 6.7305 0 0 6.7434 478.0255 396.4671 Tm <0BD7>Tj /TT1 1 Tf -0.0012 Tc -0.0388 Tw 9.607 0 0 9.6252 482.9244 398.4267 Tm [( is app)-5.1 (r)1.8 (ox)-5.1 (imated)-5.1 ( )]TJ 0.0022 Tc -0.0002 Tw -16.816 -1.156 Td [(fr)5.2 (om t)4.1 (a)8.1 (bul)4.1 (at)4.1 (e)8.1 (d)-1.7 ( )6 (val)4.1 (u)-1.7 (es)7.4 (.)6.2 ( )]TJ -0.0016 Tc 0.0036 Tw 8.843 -8.976 Td [(Equ)-5.5 (a)-1.7 (tio)-5.5 (n 1 )]TJ -0.0009 Tc -0.0511 Tw -7.493 -1.742 Td [(W)-5 (e)-1 ( emph)-4.8 (asize )6 (th)-4.8 (at th)-4.8 (is SRIM)-5.6 ( )6 (mod)-4.8 (e)-1 ( u)-4.8 (tilizes a free )6 (flig)-4.8 (h)-4.9 (t)1 ( )]TJ 0.0022 Tc 0.2637 Tw -1.35 -1.15 Td [(app)4.3 (r)5.2 (oxi)4.1 (mat)4.1 (i)4.1 (o)4.3 (n)4.3 ( t)4.1 (o)-1.7 ( save c)8.1 (o)-1.7 (m)6.1 (p)-1.8 (ut)4.1 (i)4.1 (n)4.3 (g )6 (po)4.3 (wer )6 (reso)4.3 (u)4.2 (r)-0.8 (ces. )6 (As)7.4 ( )]TJ -0.0009 Tc -0.0571 Tw 0 -1.144 TD [(su)-4.8 (ch)-4.8 ( on)-4.8 (ly )-6 (co)-4.8 (lli)7 (sio)-4.8 (n)-4.8 (s)4.3 ( o)-4.8 (ccurri)7 (ng )]TJ 0.0012 Tc -0.0532 Tw 12.047 0 Td [(afte)7.1 (r a)7.1 ( )6 (fixe)7.1 (d )6 (di)9.1 (stance i)9.1 (n)-2.7 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