%PDF-1.4
%鲣
1 0 obj
<<
/OpenAction 2 0 R
/Names 3 0 R
/Type /Catalog
/Metadata 4 0 R
/Pages 5 0 R
>>
endobj
6 0 obj
<<
/Application ('Certified by IEEE PDFeXpress at 07/28/2014 8:08:04 AM')
/IEEE#20Issue#20ID (6939760)
/Creator ('Certified by IEEE PDFeXpress at 07/28/2014 8:08:04 AM')
/Producer <4163726F6261742044697374696C6C657220382E312E30202857696E646F7773293B206D6F646966696564207573696E67206954657874AE20372E312E3120A9323030302D323031382069546578742047726F7570204E5620284147504C2D76657273696F6E29>
/IEEE#20Article#20ID (6939983)
/Title (Elastomers for control of wafer temperature in the ≈50°C range during high dose ion implantation)
/IEEE#20Publication#20ID (6927586)
/Meeting#20Ending#20Date (4 July 2014)
/Meeting#20Starting#20Date (26 June 2014)
/Subject (2014 20th International Conference on Ion Implantation Technology \(IIT\);2014; ; ;10.1109/IIT.2014.6939983)
/ModDate (D:20181207024222-05'00')
/CreationDate (D:20140728080757-07'00')
>>
endobj
2 0 obj
<<
/D [7 0 R /FitH -32768]
/S /GoTo
>>
endobj
3 0 obj
<<
/EmbeddedFiles 8 0 R
>>
endobj
4 0 obj
<<
/Length 3480
/Type /Metadata
/Subtype /XML
>>
stream
application/pdfIEEE2014 20th International Conference on Ion Implantation Technology (IIT);2014; ; ;10.1109/IIT.2014.6939983elastomersheat transferhigh power implantationIR wafer temperature sensingElastomers for control of wafer temperature in the ≈50°C range during high dose ion implantationJeff SpringerWalt WrigginsJuergen KustererKarl ZotterMichael I. Current
2014 20th International Conference on Ion Implantation Technology (IIT)1 June 201410.1109/IIT.2014.69399834
endstream
endobj
5 0 obj
<<
/Type /Pages
/Count 4
/Kids [7 0 R 9 0 R 10 0 R 11 0 R]
>>
endobj
7 0 obj
<<
/CropBox [0 0 612 792]
/Parent 5 0 R
/Type /Page
/Contents [12 0 R 13 0 R 14 0 R 15 0 R 16 0 R 17 0 R 18 0 R 19 0 R 20 0 R 21 0 R]
/Resources <<
/ExtGState <<
/GS0 22 0 R
>>
/XObject <<
/Im0 23 0 R
>>
/ProcSet [/PDF /Text /ImageC /ImageI]
/ColorSpace <<
/CS0 [/Indexed /DeviceRGB 255 24 0 R]
>>
/Font <<
/TT2 25 0 R
/TT1 26 0 R
/TT0 27 0 R
/C2_0 28 0 R
/T1_0 29 0 R
/F6 30 0 R
>>
>>
/TrimBox [0 0 612 792]
/MediaBox [0 0 612 792]
/BleedBox [0 0 612 792]
/ArtBox [0 0 612 792]
/Rotate 0
>>
endobj
8 0 obj
<<
/Kids [31 0 R]
>>
endobj
9 0 obj
<<
/CropBox [0 0 612 792]
/Parent 5 0 R
/Type /Page
/Contents [32 0 R 33 0 R 34 0 R]
/Resources <<
/ExtGState <<
/GS0 22 0 R
>>
/XObject <<
/Im3 35 0 R
/Im1 36 0 R
/Im2 37 0 R
/Im0 38 0 R
>>
/ProcSet [/PDF /Text /ImageC /ImageI]
/ColorSpace <<
/CS1 [/Indexed /DeviceRGB 255 39 0 R]
/CS2 [/Indexed /DeviceRGB 255 40 0 R]
/CS0 [/Indexed /DeviceRGB 255 41 0 R]
>>
/Font <<
/TT1 42 0 R
/TT0 27 0 R
/C2_0 28 0 R
/F4 30 0 R
>>
>>
/TrimBox [0 0 612 792]
/MediaBox [0 0 612 792]
/BleedBox [0 0 612 792]
/ArtBox [0 0 612 792]
/Rotate 0
>>
endobj
10 0 obj
<<
/CropBox [0 0 612 792]
/Parent 5 0 R
/Type /Page
/Contents [43 0 R 44 0 R 45 0 R]
/Resources <<
/ExtGState <<
/GS0 22 0 R
>>
/XObject <<
/Im1 46 0 R
/Im0 47 0 R
>>
/ProcSet [/PDF /Text /ImageC]
/Font <<
/TT1 42 0 R
/TT0 27 0 R
/C2_0 28 0 R
/F4 30 0 R
>>
>>
/TrimBox [0 0 612 792]
/MediaBox [0 0 612 792]
/BleedBox [0 0 612 792]
/ArtBox [0 0 612 792]
/Rotate 0
>>
endobj
11 0 obj
<<
/CropBox [0 0 612 792]
/Parent 5 0 R
/Type /Page
/Contents [48 0 R 49 0 R 50 0 R]
/Resources <<
/ExtGState <<
/GS0 22 0 R
>>
/XObject <<
/Im3 51 0 R
/Im1 52 0 R
/Im2 53 0 R
/Im0 54 0 R
>>
/ProcSet [/PDF /Text /ImageC /ImageI]
/ColorSpace <<
/CS1 [/Indexed /DeviceRGB 255 55 0 R]
/CS2 [/Indexed /DeviceRGB 0 56 0 R]
/CS0 [/Indexed /DeviceRGB 255 57 0 R]
>>
/Font <<
/TT2 25 0 R
/TT1 42 0 R
/TT0 27 0 R
/TT3 58 0 R
/F5 30 0 R
>>
>>
/TrimBox [0 0 612 792]
/MediaBox [0 0 612 792]
/BleedBox [0 0 612 792]
/ArtBox [0 0 612 792]
/Rotate 0
>>
endobj
12 0 obj
<<
/Length 10
/Filter /FlateDecode
>>
stream
x?? ?|
endstream
endobj
13 0 obj
<<
/Length 965
/Filter /FlateDecode
>>
stream
H塴Uo??? D)姅C<冯抌P?衊4卾在R 呻睴炕?莔@縻窠泷?m4霧府*
?hサ. 櫁?虭?緶S線?U郶驾足?d)?露`輜有铩梌le&鄵4Z?qb?鮰??@萘?齥艫4??冴~襷?\}估??€pZ?剹9畬螖卫棩矠`嫗躼冩糤s筗c?0??mv
阯嗤qh??酠?疙;?菳<黼n髺8?尊T隭&甁M竱VP=.t稑l++`?嗪旾&簼4)
5Q?,?睏箻??
m褑偅b?耣0唓?cX?=b偸S鹬)鉕?忝[R6X0熄韴+Mu???隬泥成戶$E?6E彽LJ?咐?颇?uY呼丄%迂9i}/救$GH:狝Yv?2?鯿?a|&鵏,0Z腷丐悮A橪?觸V素W詹^SS]扰墢3卆?梯聋鉎艕煍,)蒪X?灶}蜄=|柸P/瓨?D6峫>k潴5参B?敶Q/?颅L
d=?序Y 2?慫yT珗佖)U尟n砍2秫:"峃p墡>篌徺?6=鰔峥庄 mdX設俨HQ@
Q礦盉訟ジ"?緍?=製s轳庑贵槯胜郕籶?鼞x酤S簌i蒚:mH瑝M肴?剮鮚b?S竤?o殚凥!N此x~?椌g颮w?
`W彐褎垘?a榒哟?敫鮥 譡猸m甡S?頗絶鏉Z??j_赑OD?灷?Р轩叒蛯釺橰7尌紸寀?E0蔠铁鹇O︾櫷躙驉Y獺脤\?L?鈽?T?鋵"襖E$n?m螰M飂?QU?R抬心ChU鎙紂頔2aK综5Q鶧'?|綉栁碎K鼚W 綢44幛?/某gt狦OG?DГk鰺:鯸{??1 i? ?蜤
endstream
endobj
14 0 obj
<<
/Length 872
/Filter /FlateDecode
>>
stream
H塪UM徾F?+E#生竩s?H€@EI?糿街B挸瓤/撸;宖HH帥?$墦?ラt?I&蜎Dy\?洫殄?|容賅?}?吥进?媃T悪狌mL佸催嚕EF:秀,該^给P笾<韱?屽M?膛鴵ga 唥鯀(ぽ辏躚釙瞾?e閁蚲 c洌Bwc?
eP?hI~P騘)y鰥澶庈E盨d? >DU堙崷鹪鎏s??膊汴顽D灌帩溼lo?rFm?O銺灞Gn殮|F6???B?!?X瞖VWH儿Ms\嚟灐詋Q f!h?N蟀H復?捑桷?⑧T撰@皑W乎屚w?'灨L>sie︽)7Da?d晇6榳賂[GYuW郝*iE孒9B€€*埃S?+eM泗蛳wZ?)遉?祱娵?uWy傝.袿3K{?啣俄骺仧^4?葯駡瘼$k贿W0硿尝(~m譱玙??嬘扡楝O?C%耉鷀5H%恖|GVс狠芉牒???耻ㄘ'缶咱/ニ订K挗堓t?&zF?,
?L罅才d邖?莔?w隤闉欮сgf蠓蛴1?~冃邖===?哽5?M都?M澂慽鍆偉鮢?〥┚聚c?G兑﹖?棷iZn蕇羓/NP勚矔?TJ.+?i皇:麛瘞u1lF蝺<燄旈澜宿秇0P矔??z泼摶?jxz斧b撒*鎙迫布鸎y?o-经O蘷氠々楔^)口 h2\l巶;qw刄祺AH跗j? 镋跬?Dr+D(w寔{5齫?熙eU??q,螋?蕍^笍?z磽N?~P蚩 m匠?
endstream
endobj
15 0 obj
<<
/Length 856
/Filter /FlateDecode
>>
stream
H塴UMo??腘??b^:`纮?豃庹?荌??蜓u3t@k?貘鳫1?娮q?T7糐?z崲j粍"?驃陽濴m#缣藓?
[?僄h&鎙KC脰?1o謒岀e<膶4贉Wb5'^f&宆??岛柝t苌?A?X巬曩G贇饳??駸}?Т覝?EN堡泸傟{N ?$?
,D櫹↘ %JA匍蜓n矮冻?蟆FR ]愪_童86@,焌 厏?fXCK?峜(9纚蒝陠l玕挱縮?晦偈<[?o闆?迂詫飹oFLWhfI蚛#?鸬x壷巗潒?xreM??箆诶K\濑?RV?駷盌耣Q?阬fZ?*?sZD瑺a甆蛏\賕??m+誨7嶰M'吡襻NB?瓆e嬆h?H?埇??廨q?Rz}I聖碯?It"-?嶋?M缭"?騗X?ZS*两b?瓢泖S盇?i狘R黲`\p崉l綫睧Q燋"缩^x)(嬏u碩{槷A瀯?pff?嘚渜?殼寝籾榭藁>?杖>曫崬腀[ 軹BGj裰s ∷?緳 (拵葑纖]?_vV拂(? j舰v8鶑\樅+:J进乿B镰?篿甸D廡J苐?琽?
27坳郀螩9O鍜蘛踟鮙谩7尦慖躿L?嚌D燫$╀?ㄅ[攒鞚?0螔HheI0l~A~|鱘乱馈麅-{?x>絬s"牺柄#?U瑬怃nI橘h利煆